Difference between revisions of "ICP Etch 2 (Panasonic E640)"

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m (put ICP2 recipes first)
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*{{file|manualwafertransfer.pdf|Manual Wafer Transfer Instructions}}
*{{file|manualwafertransfer.pdf|Manual Wafer Transfer Instructions}}
*[[Laser Etch Monitoring|Laser Etch Monitor procedures]]
*[[Laser Etch Monitoring|Laser Etch Monitor procedures]]
*Online Training Video: [https://gauchocast.hosted.panopto.com/Panopto/Pages/Viewer.aspx?id=8b676980-1c9a-420c-a2e5-ac180139939d Panasonic ICP#2 Training]
**'''Important:''' ''This video is for reference only, and does not give you authorization to use the tool. You must be officially authorized by the supervisor before using this machine.''
= Recipes =
= Recipes =

Revision as of 08:13, 5 November 2020

ICP Etch 2 (Panasonic E640)
Tool Type Dry Etch
Location Bay 2
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description ICP Etch
Manufacturer Panasonic Factory Solutions
Dry Etch Recipes
Sign up for this tool


This is a single-chamber tool for etching of a variety of materials. The chamber is configured as an ICP etching tool with 1000 W ICP power, 500 W RF substrate power, and RT - 80°C operation with back-side He cooling and an electrostatic chuck to maintain controlled surface temperatures during etching. This chamber has Cl2, BCl3, CF4, CHF3, SF6, Ar, N2, and O2 for gas sources and can be used to etch a variety of materials from SiO2 to metals to compound semiconductors. The chamber is evacuated with a 2000 lpm Osaka Vacuum magnetically levitated turbo pump, allowing for fast pump down.

The system is also equipped with a red laser monitoring system from Intellemetrics for more precise etch stop control.

Detailed Specifications

  • 1000 W ICP source, 500 W RF Sample Bias Source in etching chamber
  • Room Temp. – 80°C sample temperature for etching. Default 15°C Chuck temperature.
  • Optimal Emission Monitoring
  • Etch pressure from 0.1 Pa to 5 Pa (0.75 mT - 37.5 mT)
  • Cl2, BCl3, (Ar or CHF3), (CF4 or SF6), N2, and O2 in etch chamber
  • O2, N2, CF4, H2O Vapor for ashing chamber
  • Single 6” diameter wafer capable system
  • Pieces possible by mounting to 6” wafer
  • 670nm laser endpoint detector with camera and simulation software: Intellemetrics LEP 500



  • Dry Etching Recipes
    • Table of all dry etching recipes, showing which tools can etch which materials etc.