Difference between revisions of "High Temp Oven (Blue M)"

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(tool id included for SUM link)
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|type = Lithography
|type = Lithography
|super= Mike Silva
|super= Brian Lingg
|location=Bay 5
|location=Bay 5
|description = High Temperature Oven
|description = High Temperature Oven

Revision as of 10:19, 15 April 2020

High Temp Oven (Blue M)
Tool Type Lithography
Location Bay 5
Supervisor Brian Lingg
Supervisor Phone (805) 893-8145
Supervisor E-Mail lingg_b@ucsb.edu
Description High Temperature Oven
Manufacturer Blue M Electric
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The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.

Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.