Difference between revisions of "High Temp Oven (Blue M)"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
m (removed "8 steps")
(tool id included for SUM link)
Line 6: Line 6:
 
|description = High Temperature Oven
 
|description = High Temperature Oven
 
|manufacturer = Blue M Electric  
 
|manufacturer = Blue M Electric  
|materials =
+
|toolid=56
|toolid=
+
}}The Blue M oven has a Nitrogen purge (manual flow) and is  able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C.  It is not actively cooled.
}}The Blue M oven has a Nitrogen purge and is  able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C.  It is not actively cooled.
 
  
 
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.
 
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.

Revision as of 09:55, 4 June 2019

High Temp Oven (Blue M)
BlueMOven.jpg
Tool Type Lithography
Location Bay 5
Supervisor Mike Silva
Supervisor Phone (805) 893-3096
Supervisor E-Mail silva@ece.ucsb.edu
Description High Temperature Oven
Manufacturer Blue M Electric
Sign up for this tool


The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.

Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.