Difference between revisions of "High Temp Oven (Blue M)"
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|picture=BlueMOven.jpg |
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|type = Lithography |
|type = Lithography |
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|location=Bay 5 |
|location=Bay 5 |
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|description = High Temperature Oven |
|description = High Temperature Oven |
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Revision as of 10:19, 15 April 2020
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The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.