Difference between revisions of "High Temp Oven (Blue M)"
Jump to navigation
Jump to search
(Created page with "{{tool|{{PAGENAME}} |picture=BlueMOven.jpg |type = Lithography |super= Mike Silva |location=Bay 5 |description = High Temperature Oven |manufacturer = Blue M Electric |materials…") |
|||
(3 intermediate revisions by one other user not shown) | |||
Line 2: | Line 2: | ||
|picture=BlueMOven.jpg |
|picture=BlueMOven.jpg |
||
|type = Lithography |
|type = Lithography |
||
− | |super= |
+ | |super= Brian Lingg |
|location=Bay 5 |
|location=Bay 5 |
||
|description = High Temperature Oven |
|description = High Temperature Oven |
||
|manufacturer = Blue M Electric |
|manufacturer = Blue M Electric |
||
⚫ | |||
− | |materials = |
||
+ | }}The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled. |
||
⚫ | |||
+ | |||
− | }} |
||
+ | Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide. |
Revision as of 10:19, 15 April 2020
|
The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.
Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.