HF Vapor Etch

HF Vapor Etch File:VHF-uETCH.jpg Tool Type Dry Etch Location Bay 2 Supervisor Mike Silva Supervisor Phone (805) 893-3096 Supervisor E-Mail silva@ece.ucsb.edu Description Vapor HF Etcher Manufacturer SPTS Inc Dry Etch Recipes Sign up for this tool

About

The applications of this tool are mainly in MEMS-device fabrication areas (releasing a MEMS structure by etching a sacrificial SiO₂ layer below) with the use of Al₂O₃, Al or some other metal as an etch mask at room temperature. The tool uses vapor HF (VHF), EtOH

Documentation

• System Manual
• Si Etching Profile & Results