Frequently Asked Questions

How do I edit a page?

First, you need to have a login. Only active cleanroom users will have an active login.

Please see the Editing Tutorials for more information on editing a page.

We recently installed a "Visual Editor" plugin, which often will allow you to avoid editing wiki code directly.

What do I do if I find an error?

If you locate a mistake, error or typo, please notify the Wiki Admin, or log in and make the change yourself.

Why aren't my edits showing up?

While lab users are allowed to edit the wiki, all those edits must be approved by a staff member.

Where do I find a recipe for a process (litho/etch/dep etc.)?

The "Recipes and Data" section on the left sidebar lists the different categories of recipes. In those pages, you can see whether a recipe exists for your process, and on which tool. We often include some basic characterization data on the recipes, but you should note that these are approximate only. If you have tight tolerances, you need to characterize the recipe yourself (ie. figure out deposition/etch rate, selectivity, verticality etc.).

For some recipes (etches in particular), we often post the parameter variations/recipe characterizations to show you how different recipe variables affect the etch. If you find that a provided recipe isn't exactly what you need, you can use this information to modify a copy of the recipe to suit your own needs. Please refer to the tool owner for creating your own recipes on each tool, especially for those that have a limited number of saved recipe slots.

A recipe is indicated as "A", Available, where do I find info on this recipe?

If a recipe is marked as "A", Available on one of the recipe tables, this usually means that a graduate student has done this process at some point, but the NanoFab hasn't necessarily verified the process nor has the exact recipe and characterization. Contact anyone in the NanoFab process group to get in contact with the research group that developed the recipe.