File:ASML Reticle Programming Params - MASKJAN2020 v1.xlsx

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ASML_Reticle_Programming_Params_-_MASKJAN2020_v1.xlsx(file size: 11 KB, MIME type: application/vnd.openxmlformats-officedocument.spreadsheetml.sheet)

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ASML Reticle programming template

File history

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Date/TimeDimensionsUserComment
current11:47, 14 February 2022 (11 KB)John d (talk | contribs)More comments to help users fill this out.
11:14, 12 April 2021 (11 KB)John d (talk | contribs)mention optional params
07:50, 20 January 2021 (11 KB)John d (talk | contribs)Added comments to make some sections clearer.
01:37, 8 November 2019 (11 KB)John d (talk | contribs)retry scrolling
01:35, 8 November 2019 (11 KB)John d (talk | contribs)scrolled properly, indicated scale of coordinates are 1x wafer-scale
11:52, 19 November 2018 (80 KB)John d (talk | contribs)formatting
11:30, 19 November 2018 (80 KB)John d (talk | contribs)ASML Reticle programming template

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