The Woolam M2000DI Variable Angle Spectroscopic Ellipsometer is used for the general characterization of optical thin films using ellipsometry. This tool incorporates a wavelength range from 193nm up to 1650nm and a motorized variable angle control from 45 degrees to 90 degrees in order to provide the widest flexibility for characterization of optical (and some electrical) properties of thin films. The CompletEASE software makes measurement taking and simple analysis very straightforward and provides for complex multi-layer and absorbing film analysis as well. All data is saved for each film so that post-measurement analysis can be performed. This system is also in-situ capable for the ALD system in the facility.