E-Beam Evaporation Recipes

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Back to Vacuum Deposition Recipes.

Vapor Pressure Chart and Materials Deposition Table

Aluminum Deposition

E-Beam 1 (Sharon)

Ar-Ion Beam Source

Materials Table (E-Beam #1)

Materials Table
Material Position Hearth / Crucible Film Number Density Z Ratio Tooling Comments
Ag 4 C 5 10.5 0.529 140
Al 2 C 6 2.7 1.080 118
Al2O3 1 C 6 3.97 0.336 169
Au 4 C 4 19.3 0.381 138 Bazookas can be used at 20-30Å/sec.
AuGe 3 C 5 17.63 0.397 151 Composition unpredictable unless you practically empty the crucible.
Cr 3 H 6 7.2 0.305 140 Do not evaporate more than 200Å of Cr in the E-Beam evaporator.
Fe 7.86 0.349
Ge 3 C 6 5.35 0.516 130
Gd 3 H 3 7.89 0.670 120 Use only with permission
MgO 1 6 3.58 0.411 Use only with permission
Mo 10.2 0.257 140
Ni 1 H 1 8.91 0.331 140 Prone to spitting. Cool down for 15 minutes before venting.
NiCr 1 H 6 8.50 0.3258 Density and z-ratio for Nichrome IV
Nb 4 C 6 8.57 0.516 ( should be 0.492) Cool down for at least 35 minutes before venting.
Pd 1 H 9 12.0 0.357 140
Pt 1 C 8 21.40 0.245 140 Prone to spitting. Evaporate at 1.5Å/sec or less.
Ru 1 C 6 12.362 0.182 142 Prone to spitting. Evaporate at 1.0Å/sec or less.
Si 2 H 2 2.32 0.712 150 Cool down very slowly after evaporating lest you crack the source.
SiO C 6 2.13 0.87 132 Use only with permission
SiO2 1 C 6 2.648 1.00 140 Please change the crystal and the upper mirror after evaporating oxide. Density 2.2-2.7 according to thin film dep. table. Use only with permission
SrF2 1 C 6 4.28 0.727 140 Use only with permission
Ta 1 H 6 16.6 0.262 Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call me before you try Ta.
W 1 C 6 19.3 0.163 138
Ti 3 H 3 4.50 0.628 139

E-Beam 2 (Custom)

Materials Table (E-Beam #2)

Materials Table
Material Density, g/cm3 Z Ratio Tooling factor, % Comments
Al2O3 3.97 0.336 140.0 Tony could you please check this?
GeO2 6.24 1.000 139.0
ITO 6.43-7.14 1.000 139.0 z ratio unknown
MgO 3.58 0.411 157.6 OK
Si 2.32 0.712 150.0
SiO2 2.648 1.000 157.6 Density 2.2-2.7 according to thin film deposition tables
SiOx 2.13 0.87 130.0
SrF2 4.28 0.727 140.0
Ta2O5 8.2 0.30 157.6
TiO2 4.26 0.400 139.0

E-Beam 3 (Temescal)

Materials Table (E-Beam #3)

Materials Table
Material Gun Hearth /Crucible Process Gain, A/sec/%pwr Film Number Density, g/cm3 Z Ratio Tooling, % Comments
Ag Rear C 10.0 2 10.50 0.529 67
Al Rear C 10.0 1 2.70 1.080 53
Au Front C 2.0 3 19.30 0.381 56
Ge Rear C 10.0 3 5.35 0.516 80
Ni Front C 0.5 2 8.91 0.331 67
Pd Rear C 0.9 4 12.038 0.357 48
Pt Front C 0.4 1 21.40 0.245 67
Ti Front C 5.0 4 4.50 0.628 67

E-Beam 4 (CHA)

Materials Table (E-Beam #4)

Materials Table
Material Density, g/cm3 Z Ratio Master tooling, % Process Gain, A/sec/%pwr Comments
Ag 10.50 0.529 110 10.0
Al 2.70 1.080 165 6.0
Au 19.30 0.381 120 10.0
Co 8.90 0.343 150 5.0
Cr 7.20 0.305 140 10.0
Fe 7.86 0.349 165 10.0
Ge 5.35 0.516 126 10.0
Hf 13.09 0.360 150 10.0
Ir 22.40 0.129 130 10.0
Ni 8.91 0.331 150 5.0
NiCr 8.50 0.3258 140 10.0 density and z ratio for Nichrome IV
NiFe 8.70 1.000 100 10.0
Pd 12.038 0.357 112 10.0
Pt 21.40 0.245 130 10.0
Ru 12.362 0.182 100 10.0
Ti 4.50 0.628 183 10.0
Zr 6.49 0.600 150 10.0