Difference between revisions of "E-Beam Evaporation Recipes"
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{{recipes|Vacuum Deposition}} |
{{recipes|Vacuum Deposition}} |
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=[[E-Beam 1 (Sharon)]]= |
=[[E-Beam 1 (Sharon)]]= |
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+ | ==Materials Table== |
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+ | {| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible wikitable" |
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+ | |- |
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+ | ! colspan=8 width=1100 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div> |
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+ | |- bgcolor="#D0E7FF" |
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+ | ! width="75" bgcolor="#D0E7FF" align="center" | '''Material''' |
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+ | ! width="75" bgcolor="#D0E7FF" align="center" | '''Position''' |
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+ | ! width="75" bgcolor="#D0E7FF" align="center" | '''Hearth / Crucible''' |
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+ | ! width="85" bgcolor="#D0E7FF" align="center" | '''Film Number''' |
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+ | ! width="75" bgcolor="#D0E7FF" align="center" | '''Density''' |
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+ | ! width="75" bgcolor="#D0E7FF" align="center" | '''Z Ratio''' |
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+ | ! width="75" bgcolor="#D0E7FF" align="center" | '''Tooling''' |
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+ | ! width="500" bgcolor="#D0E7FF" align="center" | '''Comments''' |
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+ | |- |
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+ | | Ag |
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+ | | 4 |
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+ | | C |
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+ | | 5 |
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+ | | 10.5 |
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+ | | 0.524 |
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+ | | 140 |
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+ | | Brian, could you please check this table? Z ratio should be 0.529 |
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+ | |- |
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+ | | Al |
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+ | | 2 |
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+ | | C |
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+ | | 6 |
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+ | | 2.7 |
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+ | | 1.080 |
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+ | | 118 |
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+ | | |
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+ | |- |
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+ | | Al<sub>2</sub>O<sub>3</sub> |
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+ | | 1 |
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+ | | C |
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+ | | 6 |
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+ | | 3.97 |
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+ | | 0.50 |
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+ | | 169 |
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+ | | Z-ratio should be 0.336 |
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+ | |- |
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+ | | Au |
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+ | | 4 |
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+ | | C |
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+ | | 4 |
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+ | | 19.3 |
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+ | | 0.381 |
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+ | | 138 |
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+ | | Bazookas can be used at 20-30Å/sec. |
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+ | |- |
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+ | | AuGe |
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+ | | 3 |
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+ | | C |
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+ | | 5 |
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+ | | 17.63 |
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+ | | 0.397 |
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+ | | 151 |
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+ | | Composition unpredictable unless you practically empty the crucible. |
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+ | |- |
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+ | | Cr |
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+ | | 3 |
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+ | | H |
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+ | | 6 |
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+ | | 7.2 |
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+ | | 0.305 |
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+ | | 140 |
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+ | | Do not evaporate more than 200Å of Cr in the E-Beam evaporator. |
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+ | |- |
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+ | | Fe |
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+ | | |
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+ | | |
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+ | | |
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+ | | 7.86 |
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+ | | 0.349 |
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+ | | |
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+ | | |
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+ | |- |
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+ | | Ge |
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+ | | 3 |
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+ | | C |
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+ | | 6 |
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+ | | 5.35 |
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+ | | 0.516 |
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+ | | 130 |
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+ | | |
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+ | |- |
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+ | | MgO |
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+ | | 1 |
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+ | | |
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+ | | 6 |
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+ | | 3.58 |
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+ | | 0.411 |
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+ | | |
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+ | | |
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+ | |- |
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+ | | Mo |
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+ | | |
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+ | | |
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+ | | |
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+ | | 10.2 |
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+ | | 0.257 |
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+ | | |
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+ | | |
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+ | |- |
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+ | | Ni |
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+ | | 1 |
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+ | | H |
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+ | | 1 |
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+ | | 8.91 |
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+ | | 0.331 |
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+ | | 140 |
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+ | | Prone to spitting. Cool down for 15 minutes before venting. |
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+ | |- |
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+ | | NiCr |
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+ | | 1 |
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+ | | H |
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+ | | 6 |
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+ | | 8.23 |
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+ | | 0.321 |
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+ | | |
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+ | | Density 8.52, z ratio 0.3258 |
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+ | |- |
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+ | | Nb |
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+ | | 4 |
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+ | | C |
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+ | | 6 |
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+ | | 8.57 |
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+ | | 0.516 ( should be 0.492) |
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+ | | |
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+ | | Cool down for at least 35 minutes before venting. |
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+ | |- |
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+ | | Pd |
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+ | | 1 |
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+ | | H |
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+ | | 9 |
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+ | | 12.0 |
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+ | | 0.357 |
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+ | | 140 |
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+ | | |
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+ | |- |
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+ | | Pt |
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+ | | 1 |
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+ | | C |
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+ | | 8 |
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+ | | 21.40 |
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+ | | 0.245 |
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+ | | 140 |
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+ | | Prone to spitting. Evaporate at 1.5Å/sec or less. |
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+ | |- |
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+ | | Si |
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+ | | 2 |
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+ | | H |
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+ | | 2 |
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+ | | 2.32 |
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+ | | 0.712 |
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+ | | 150 |
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+ | | Cool down very slowly after evaporating lest you crack the source. |
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+ | |- |
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+ | | SiO |
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+ | | |
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+ | | C |
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+ | | 6 |
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+ | | 2.13 |
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+ | | 0.87 |
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+ | | 132 |
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+ | | |
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+ | |- |
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+ | | SiO<sub>2</sub> |
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+ | | 1 |
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+ | | C |
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+ | | 6 |
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+ | | 2.2 ( should be 2.648) |
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+ | | 1.07 ( should be 1.000) |
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+ | | 140 |
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+ | | Please change the crystal and the upper mirror after evaporating oxide. |
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+ | |- |
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+ | | SrF<sub>2</sub> |
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+ | | 1 |
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+ | | C |
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+ | | 6 |
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+ | | 4.28 |
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+ | | 0.727 |
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+ | | 140 |
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+ | | |
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+ | |- |
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+ | | Ta |
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+ | | 1 |
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+ | | H |
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+ | | 6 |
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+ | | 16.6 |
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+ | | 0.262 |
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+ | | |
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+ | | Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call me before you try Ta. |
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+ | |- |
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+ | | W |
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+ | | 1 |
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+ | | C |
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+ | | 6 |
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+ | | 19.3 |
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+ | | 0.163 |
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+ | | 138 |
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+ | | |
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+ | |- |
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+ | | Ti |
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+ | | 3 |
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+ | | H |
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+ | | 3 |
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+ | | 4.50 |
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+ | | 0.628 |
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+ | | 139 |
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+ | | |
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+ | |} |
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+ | |||
=[[E-Beam 2 (Custom)]]= |
=[[E-Beam 2 (Custom)]]= |
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=[[E-Beam 3 (Temescal)]]= |
=[[E-Beam 3 (Temescal)]]= |
Revision as of 10:58, 7 September 2012
Back to Vacuum Deposition Recipes.
E-Beam 1 (Sharon)
Materials Table
Materials Table
| |||||||
---|---|---|---|---|---|---|---|
Material | Position | Hearth / Crucible | Film Number | Density | Z Ratio | Tooling | Comments |
Ag | 4 | C | 5 | 10.5 | 0.524 | 140 | Brian, could you please check this table? Z ratio should be 0.529 |
Al | 2 | C | 6 | 2.7 | 1.080 | 118 | |
Al2O3 | 1 | C | 6 | 3.97 | 0.50 | 169 | Z-ratio should be 0.336 |
Au | 4 | C | 4 | 19.3 | 0.381 | 138 | Bazookas can be used at 20-30Å/sec. |
AuGe | 3 | C | 5 | 17.63 | 0.397 | 151 | Composition unpredictable unless you practically empty the crucible. |
Cr | 3 | H | 6 | 7.2 | 0.305 | 140 | Do not evaporate more than 200Å of Cr in the E-Beam evaporator. |
Fe | 7.86 | 0.349 | |||||
Ge | 3 | C | 6 | 5.35 | 0.516 | 130 | |
MgO | 1 | 6 | 3.58 | 0.411 | |||
Mo | 10.2 | 0.257 | |||||
Ni | 1 | H | 1 | 8.91 | 0.331 | 140 | Prone to spitting. Cool down for 15 minutes before venting. |
NiCr | 1 | H | 6 | 8.23 | 0.321 | Density 8.52, z ratio 0.3258 | |
Nb | 4 | C | 6 | 8.57 | 0.516 ( should be 0.492) | Cool down for at least 35 minutes before venting. | |
Pd | 1 | H | 9 | 12.0 | 0.357 | 140 | |
Pt | 1 | C | 8 | 21.40 | 0.245 | 140 | Prone to spitting. Evaporate at 1.5Å/sec or less. |
Si | 2 | H | 2 | 2.32 | 0.712 | 150 | Cool down very slowly after evaporating lest you crack the source. |
SiO | C | 6 | 2.13 | 0.87 | 132 | ||
SiO2 | 1 | C | 6 | 2.2 ( should be 2.648) | 1.07 ( should be 1.000) | 140 | Please change the crystal and the upper mirror after evaporating oxide. |
SrF2 | 1 | C | 6 | 4.28 | 0.727 | 140 | |
Ta | 1 | H | 6 | 16.6 | 0.262 | Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call me before you try Ta. | |
W | 1 | C | 6 | 19.3 | 0.163 | 138 | |
Ti | 3 | H | 3 | 4.50 | 0.628 | 139 |