Difference between revisions of "E-Beam Evaporation Recipes"
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==Materials Table (E-Beam #1)== |
==Materials Table (E-Beam #1)== |
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+ | ''There are four hearth "positions" able to be loaded at any one time, meaning only up to 4 materials can be evaporated without breaking vacuum. Now able to handle Four-4" wafers in one run.'' |
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− | {| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible wikitable" |
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+ | {| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1" |
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− | |- |
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− | ! colspan=8 width=1100 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div> |
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|- bgcolor="#D0E7FF" |
|- bgcolor="#D0E7FF" |
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− | ! width="75" |
+ | ! width="75" align="center" bgcolor="#D0E7FF" | '''Material''' |
− | ! width="75" |
+ | ! width="75" align="center" bgcolor="#D0E7FF" | '''Position''' |
− | ! width="75" |
+ | ! width="75" align="center" bgcolor="#D0E7FF" | '''Hearth / Crucible''' |
− | ! width="85" |
+ | ! width="85" align="center" bgcolor="#D0E7FF" | '''Film Number''' |
− | ! width="75" |
+ | ! width="75" align="center" bgcolor="#D0E7FF" | '''Density''' |
− | ! width="75" |
+ | ! width="75" align="center" bgcolor="#D0E7FF" | '''Z Ratio''' |
− | ! width="75" |
+ | ! width="75" align="center" bgcolor="#D0E7FF" | '''Tooling''' |
− | ! width="500" |
+ | ! width="500" align="center" bgcolor="#D0E7FF" | '''Comments''' |
|- |
|- |
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| Ag |
| Ag |
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Line 72: | Line 71: | ||
| Composition unpredictable unless you practically empty the crucible. |
| Composition unpredictable unless you practically empty the crucible. |
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|- |
|- |
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− | | |
+ | |C |
− | | |
+ | |2 |
− | | |
+ | |H |
− | | |
+ | |2 |
− | | |
+ | |2.250 |
− | | |
+ | |3.260 |
+ | |150 |
||
− | | 140 |
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+ | |Carbon. Must sweep beam. 1Å/sec (fluctuating 0.4–0.9Å/sec) at ~1.4–1.6 emission. |
||
− | | Do not evaporate more than 200Å of Cr in the E-Beam evaporator. |
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+ | |- |
||
+ | |Co |
||
+ | | 2 |
||
+ | | C |
||
+ | | 1 |
||
+ | | 8.9 |
||
+ | | 0.343 |
||
+ | | 150 |
||
+ | | '''Use only with permission''' |
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|- |
|- |
||
| Fe |
| Fe |
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Line 106: | Line 114: | ||
| 0.670 |
| 0.670 |
||
| 120 |
| 120 |
||
− | |Use only with permission |
+ | |'''Use only with permission''' |
| |
| |
||
|- |
|- |
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Line 116: | Line 124: | ||
| 0.411 |
| 0.411 |
||
| |
| |
||
− | | Use only with permission |
+ | | '''Use only with permission''' |
|- |
|- |
||
| Mo |
| Mo |
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Line 179: | Line 187: | ||
| 0.182 |
| 0.182 |
||
| 142 |
| 142 |
||
− | | Prone to spitting. Evaporate at 1.0Å/sec or less. |
+ | | Prone to spitting. Evaporate at 1.0Å/sec or less. Cool down for 20 minutes before venting. |
|- |
|- |
||
| Si |
| Si |
||
Line 197: | Line 205: | ||
| 0.87 |
| 0.87 |
||
| 132 |
| 132 |
||
− | | Use only with permission |
+ | | '''Use only with permission''' |
|- |
|- |
||
| SiO<sub>2</sub> |
| SiO<sub>2</sub> |
||
Line 206: | Line 214: | ||
| 1.00 |
| 1.00 |
||
| 140 |
| 140 |
||
+ | | '''Use only with permission.''' |
||
− | | Please change the crystal and the upper mirror after evaporating oxide. Density 2.2-2.7 according to thin film dep. table. Use only with permission |
||
+ | Please change the crystal and the upper mirror after evaporating oxide. Density 2.2-2.7 according to thin film dep. table. |
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|- |
|- |
||
| SrF<sub>2</sub> |
| SrF<sub>2</sub> |
||
Line 215: | Line 224: | ||
| 0.727 |
| 0.727 |
||
| 140 |
| 140 |
||
− | | Use only with permission |
+ | | '''Use only with permission''' |
|- |
|- |
||
| Ta |
| Ta |
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Line 224: | Line 233: | ||
| 0.262 |
| 0.262 |
||
| |
| |
||
− | | Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call |
+ | | Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call maintainer before you try Ta. |
|- |
|- |
||
| W |
| W |
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Line 247: | Line 256: | ||
=[[E-Beam 2 (Custom)]]= |
=[[E-Beam 2 (Custom)]]= |
||
==Materials Table (E-Beam #2)== |
==Materials Table (E-Beam #2)== |
||
− | {| |
+ | {| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1" |
− | |- |
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− | ! colspan=5 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div> |
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|- bgcolor="#D0E7FF" |
|- bgcolor="#D0E7FF" |
||
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Material''' |
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Density, g/cm3''' |
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Z Ratio''' |
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Tooling factor, %''' |
− | ! width="100" |
+ | ! width="100" align="center" bgcolor="#D0E7FF" | '''Comments''' |
|- |
|- |
||
|Al<sub>2</sub>O<sub>3</sub> |
|Al<sub>2</sub>O<sub>3</sub> |
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Line 262: | Line 269: | ||
|140.0 |
|140.0 |
||
|Tony could you please check this? |
|Tony could you please check this? |
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+ | |- |
||
+ | |CeO<sub>2</sub> |
||
+ | |7.13 |
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+ | |1.000 |
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+ | |252.0 |
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+ | |Deposition at room temperature (see the details in the following file) |
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+ | |- |
||
+ | |CeO<sub>2</sub> |
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+ | |7.13 |
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+ | |1.000 |
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+ | |117.0 |
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+ | |Deposition at 200 C (see the details in the following file) |
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+ | |- |
||
+ | |CeO<sub>2</sub> |
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+ | |7.13 |
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+ | |1.000 |
||
+ | |99.7 |
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+ | |Deposition at 250 C (see the details in the following file) |
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|- |
|- |
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|GeO<sub>2</sub> |
|GeO<sub>2</sub> |
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|- |
|- |
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|} |
|} |
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+ | |||
+ | ==ITO deposition (E-Beam 2)== |
||
+ | *[[media:Rapid Thermal Annealing on Room-temperature grown ITO.pdf|Room-temperature ITO Deposition, Annealing, and Electrical and Optical Properties]] |
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+ | *[[media:ITO film-200C-O2-35sccm-EBeam2.pdf|ITO Deposition at 200 C]] |
||
+ | |||
+ | ==CeO<sub>2</sub> deposition (E-Beam 2)== |
||
+ | *[[media:CeO2 Deposition-EBeam2.pdf|Room- and High-temperature CeO<sub>2</sub> Depositions with and without an Additional Oxygen Gas Flow]] |
||
=[[E-Beam 3 (Temescal)]]= |
=[[E-Beam 3 (Temescal)]]= |
||
==Materials Table (E-Beam #3)== |
==Materials Table (E-Beam #3)== |
||
+ | ''The following materials are always installed in the evaporator. There are 4 materials available on each gun (front/rear guns), allowing for co-deposition by running both guns simultaneously.'' |
||
− | {| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible wikitable" |
||
+ | {| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1" |
||
|- |
|- |
||
− | ! colspan=9 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div> |
||
|- bgcolor="#D0E7FF" |
|- bgcolor="#D0E7FF" |
||
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Material''' |
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Gun''' |
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Hearth /Crucible''' |
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Process Gain, A/sec/%pwr''' |
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Film Number''' |
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Density, g/cm3''' |
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Z Ratio''' |
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Tooling, %''' |
− | ! width="100" |
+ | ! width="100" align="center" bgcolor="#D0E7FF" | '''Comments''' |
− | |- |
||
− | |Ag |
||
− | | Rear |
||
− | | C |
||
− | | 10.0 |
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− | | 2 |
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− | |10.50 |
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− | | 0.529 |
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− | | 67 |
||
− | | |
||
− | |- |
||
− | | Al |
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− | | Rear |
||
− | | C |
||
− | | 10.0 |
||
− | | 1 |
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− | |2.70 |
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− | | 1.080 |
||
− | | 53 |
||
− | | |
||
|- |
|- |
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| Au |
| Au |
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Line 363: | Line 375: | ||
| 0.381 |
| 0.381 |
||
| 56 |
| 56 |
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− | | |
||
− | |- |
||
− | | Ge |
||
− | | Rear |
||
− | | C |
||
− | | 10.0 |
||
− | | 3 |
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− | |5.35 |
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− | | 0.516 |
||
− | | 80 |
||
| |
| |
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|- |
|- |
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Line 383: | Line 385: | ||
| 0.331 |
| 0.331 |
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| 67 |
| 67 |
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− | | |
||
− | |- |
||
− | | Pd |
||
− | | Rear |
||
− | | C |
||
− | | 0.9 |
||
− | | 4 |
||
− | |12.038 |
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− | | 0.357 |
||
− | | 48 |
||
| |
| |
||
|- |
|- |
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Line 413: | Line 405: | ||
| 0.628 |
| 0.628 |
||
| 67 |
| 67 |
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+ | | |
||
+ | |- |
||
+ | |Ag |
||
+ | | Rear |
||
+ | | C |
||
+ | | 10.0 |
||
+ | | 2 |
||
+ | |10.50 |
||
+ | | 0.529 |
||
+ | | 67 |
||
+ | | |
||
+ | |- |
||
+ | | Al |
||
+ | | Rear |
||
+ | | C |
||
+ | | 10.0 |
||
+ | | 1 |
||
+ | |2.70 |
||
+ | | 1.080 |
||
+ | | 53 |
||
+ | | |
||
+ | |- |
||
+ | | Ge |
||
+ | | Rear |
||
+ | | C |
||
+ | | 10.0 |
||
+ | | 3 |
||
+ | |5.35 |
||
+ | | 0.516 |
||
+ | | 80 |
||
+ | | |
||
+ | |- |
||
+ | | Pd |
||
+ | | Rear |
||
+ | | C |
||
+ | | 0.9 |
||
+ | | 4 |
||
+ | |12.038 |
||
+ | | 0.357 |
||
+ | | 48 |
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| |
| |
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|- |
|- |
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Line 419: | Line 451: | ||
=[[E-Beam 4 (CHA)]]= |
=[[E-Beam 4 (CHA)]]= |
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==Materials Table (E-Beam #4)== |
==Materials Table (E-Beam #4)== |
||
− | {| |
+ | {| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1" |
− | |- |
||
− | ! colspan=6 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div> |
||
|- bgcolor="#D0E7FF" |
|- bgcolor="#D0E7FF" |
||
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Material''' |
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Density, g/cm3''' |
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Z Ratio''' |
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Master tooling, %''' |
− | ! width="45" |
+ | ! width="45" align="center" bgcolor="#D0E7FF" | '''Process Gain, A/sec/%pwr''' |
− | ! width="100" |
+ | ! width="100" align="center" bgcolor="#D0E7FF" | '''Comments''' |
|- |
|- |
||
|Ag |
|Ag |
Revision as of 14:10, 3 April 2018
Back to Vacuum Deposition Recipes.
Vapor Pressure Chart and Materials Deposition Table
Aluminum Deposition
E-Beam 1 (Sharon)
Ar-Ion Beam Source
Materials Table (E-Beam #1)
There are four hearth "positions" able to be loaded at any one time, meaning only up to 4 materials can be evaporated without breaking vacuum. Now able to handle Four-4" wafers in one run.
Material | Position | Hearth / Crucible | Film Number | Density | Z Ratio | Tooling | Comments | |
---|---|---|---|---|---|---|---|---|
Ag | 4 | C | 5 | 10.5 | 0.529 | 140 | ||
Al | 2 | C | 6 | 2.7 | 1.080 | 118 | ||
Al2O3 | 1 | C | 6 | 3.97 | 0.336 | 169 | ||
Au | 4 | C | 4 | 19.3 | 0.381 | 138 | Bazookas can be used at 20-30Å/sec. | |
AuGe | 3 | C | 5 | 17.63 | 0.397 | 151 | Composition unpredictable unless you practically empty the crucible. | |
C | 2 | H | 2 | 2.250 | 3.260 | 150 | Carbon. Must sweep beam. 1Å/sec (fluctuating 0.4–0.9Å/sec) at ~1.4–1.6 emission. | |
Co | 2 | C | 1 | 8.9 | 0.343 | 150 | Use only with permission | |
Fe | 7.86 | 0.349 | ||||||
Ge | 3 | C | 6 | 5.35 | 0.516 | 130 | ||
Gd | 3 | H | 3 | 7.89 | 0.670 | 120 | Use only with permission | |
MgO | 1 | 6 | 3.58 | 0.411 | Use only with permission | |||
Mo | 10.2 | 0.257 | 140 | |||||
Ni | 1 | H | 1 | 8.91 | 0.331 | 140 | Prone to spitting. Cool down for 15 minutes before venting. | |
NiCr | 1 | H | 6 | 8.50 | 0.3258 | Density and z-ratio for Nichrome IV | ||
Nb | 4 | C | 6 | 8.57 | 0.516 ( should be 0.492) | Cool down for at least 35 minutes before venting. | ||
Pd | 1 | H | 9 | 12.0 | 0.357 | 140 | ||
Pt | 1 | C | 8 | 21.40 | 0.245 | 140 | Prone to spitting. Evaporate at 1.5Å/sec or less. | |
Ru | 1 | C | 6 | 12.362 | 0.182 | 142 | Prone to spitting. Evaporate at 1.0Å/sec or less. Cool down for 20 minutes before venting. | |
Si | 2 | H | 2 | 2.32 | 0.712 | 150 | Cool down very slowly after evaporating lest you crack the source. | |
SiO | C | 6 | 2.13 | 0.87 | 132 | Use only with permission | ||
SiO2 | 1 | C | 6 | 2.648 | 1.00 | 140 | Use only with permission.
Please change the crystal and the upper mirror after evaporating oxide. Density 2.2-2.7 according to thin film dep. table. | |
SrF2 | 1 | C | 6 | 4.28 | 0.727 | 140 | Use only with permission | |
Ta | 1 | H | 6 | 16.6 | 0.262 | Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call maintainer before you try Ta. | ||
W | 1 | C | 6 | 19.3 | 0.163 | 138 | ||
Ti | 3 | H | 3 | 4.50 | 0.628 | 139 |
E-Beam 2 (Custom)
Materials Table (E-Beam #2)
Material | Density, g/cm3 | Z Ratio | Tooling factor, % | Comments |
---|---|---|---|---|
Al2O3 | 3.97 | 0.336 | 140.0 | Tony could you please check this? |
CeO2 | 7.13 | 1.000 | 252.0 | Deposition at room temperature (see the details in the following file) |
CeO2 | 7.13 | 1.000 | 117.0 | Deposition at 200 C (see the details in the following file) |
CeO2 | 7.13 | 1.000 | 99.7 | Deposition at 250 C (see the details in the following file) |
GeO2 | 6.24 | 1.000 | 139.0 | |
ITO | 6.43-7.14 | 1.000 | 139.0 | z ratio unknown |
MgO | 3.58 | 0.411 | 157.6 | OK |
Si | 2.32 | 0.712 | 150.0 | |
SiO2 | 2.648 | 1.000 | 157.6 | Density 2.2-2.7 according to thin film deposition tables |
SiOx | 2.13 | 0.87 | 130.0 | |
SrF2 | 4.28 | 0.727 | 140.0 | |
Ta2O5 | 8.2 | 0.30 | 157.6 | |
TiO2 | 4.26 | 0.400 | 139.0 |
ITO deposition (E-Beam 2)
- Room-temperature ITO Deposition, Annealing, and Electrical and Optical Properties
- ITO Deposition at 200 C
CeO2 deposition (E-Beam 2)
E-Beam 3 (Temescal)
Materials Table (E-Beam #3)
The following materials are always installed in the evaporator. There are 4 materials available on each gun (front/rear guns), allowing for co-deposition by running both guns simultaneously.
Material | Gun | Hearth /Crucible | Process Gain, A/sec/%pwr | Film Number | Density, g/cm3 | Z Ratio | Tooling, % | Comments |
---|---|---|---|---|---|---|---|---|
Au | Front | C | 2.0 | 3 | 19.30 | 0.381 | 56 | |
Ni | Front | C | 0.5 | 2 | 8.91 | 0.331 | 67 | |
Pt | Front | C | 0.4 | 1 | 21.40 | 0.245 | 67 | |
Ti | Front | C | 5.0 | 4 | 4.50 | 0.628 | 67 | |
Ag | Rear | C | 10.0 | 2 | 10.50 | 0.529 | 67 | |
Al | Rear | C | 10.0 | 1 | 2.70 | 1.080 | 53 | |
Ge | Rear | C | 10.0 | 3 | 5.35 | 0.516 | 80 | |
Pd | Rear | C | 0.9 | 4 | 12.038 | 0.357 | 48 |
E-Beam 4 (CHA)
Materials Table (E-Beam #4)
Material | Density, g/cm3 | Z Ratio | Master tooling, % | Process Gain, A/sec/%pwr | Comments |
---|---|---|---|---|---|
Ag | 10.50 | 0.529 | 110 | 10.0 | |
Al | 2.70 | 1.080 | 165 | 6.0 | |
Au | 19.30 | 0.381 | 120 | 10.0 | |
Co | 8.90 | 0.343 | 150 | 5.0 | |
Cr | 7.20 | 0.305 | 140 | 10.0 | |
Fe | 7.86 | 0.349 | 165 | 10.0 | |
Ge | 5.35 | 0.516 | 126 | 10.0 | |
Hf | 13.09 | 0.360 | 150 | 10.0 | |
Ir | 22.40 | 0.129 | 130 | 10.0 | |
Ni | 8.91 | 0.331 | 150 | 5.0 | |
NiCr | 8.50 | 0.3258 | 140 | 10.0 | density and z ratio for Nichrome IV |
NiFe | 8.70 | 1.000 | 100 | 10.0 | |
Pd | 12.038 | 0.357 | 112 | 10.0 | |
Pt | 21.40 | 0.245 | 130 | 10.0 | |
Ru | 12.362 | 0.182 | 100 | 10.0 | |
Ti | 4.50 | 0.628 | 183 | 10.0 | |
Zr | 6.49 | 0.600 | 150 | 10.0 |