Difference between revisions of "E-Beam Evaporation Recipes"

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{{recipes|Vacuum Deposition}}
  
{{recipes|Vacuum Deposition}}
  +
= Vapor Pressure Chart and Materials Deposition Table =
  +
*[[media:Vapor-Pressure-Chart-2.xlsx|Vapor Pressure of Metals (Excel)]]
  +
*[http://www.lesker.com/newweb/deposition_materials/MaterialDeposition.cfm?pgid=0#| Lesker Deposition Table]
  +
  +
=Aluminum Deposition=
  +
*[[media:Al-thickness-variation-with-rate.jpg|Al thickness change with deposition rate]]
  +
  +
*[[media:Al-AFM-Variation-Deposition-Rate-Rev1.pdf|Morphology Variation with Deposition Rate - Ebeam 1]]
  +
 
=[[E-Beam 1 (Sharon)]]=
  
=[[E-Beam 1 (Sharon)]]=
  +
==Ar-Ion Beam Source==
  +
*[[media:argon-ion-beam-etching-ebeam1-procedure-data-revA.pdf|Procedure and data for ion-mill in ebeam1]]
  +
 
==Materials Table (E-Beam #1)==
  
==Materials Table (E-Beam #1)==
  +
''There are four hearth "positions" able to be loaded at any one time, meaning only up to 4 materials can be evaporated without breaking vacuum. Now able to handle Four-4" wafers in one run.''
−
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible wikitable"
  
  +
{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
−
|-
  
−
! colspan=8 width=1100 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div>
  
 
|- bgcolor="#D0E7FF"
 
|- bgcolor="#D0E7FF"
−
! width="75" bgcolor="#D0E7FF" align="center" | '''Material'''
+
! width="75" align="center" bgcolor="#D0E7FF" | '''Material'''
−
! width="75" bgcolor="#D0E7FF" align="center" | '''Position'''
+
! width="75" align="center" bgcolor="#D0E7FF" | '''Position'''
−
! width="75" bgcolor="#D0E7FF" align="center" | '''Hearth / Crucible'''
+
! width="75" align="center" bgcolor="#D0E7FF" | '''Hearth / Crucible'''
−
! width="85" bgcolor="#D0E7FF" align="center" | '''Film Number'''
+
! width="85" align="center" bgcolor="#D0E7FF" | '''Film Number'''
−
! width="75" bgcolor="#D0E7FF" align="center" | '''Density'''
+
! width="75" align="center" bgcolor="#D0E7FF" | '''Density'''
−
! width="75" bgcolor="#D0E7FF" align="center" | '''Z Ratio'''
+
! width="75" align="center" bgcolor="#D0E7FF" | '''Z Ratio'''
−
! width="75" bgcolor="#D0E7FF" align="center" | '''Tooling'''
+
! width="75" align="center" bgcolor="#D0E7FF" | '''Tooling'''
−
! width="500" bgcolor="#D0E7FF" align="center" | '''Comments'''
 +
! width="500" align="center" bgcolor="#D0E7FF" | '''Comments'''
 
|-
  
|-
 
| Ag
  
| Ag
Line 20: Line 31:
 
| 5
  
| 5
 
| 10.5
  
| 10.5
−
| 0.524
 +
| 0.529
 
| 140
  
| 140
  +
|
−
| Brian, could you please check this table? Z ratio should be 0.529
  
 
|-
  
|-
 
| Al
  
| Al
Line 38: Line 49:
 
| 6
  
| 6
 
| 3.97
  
| 3.97
−
| 0.50
 +
| 0.336
 
| 169
  
| 169
  +
|
−
| Z-ratio should be 0.336
  
 
|-
  
|-
 
| Au
  
| Au
Line 60: Line 71:
 
| Composition unpredictable unless you practically empty the crucible.
  
| Composition unpredictable unless you practically empty the crucible.
 
|-
  
|-
−
| Cr
 +
|C
−
| 3
 +
|2
−
| H
 +
|H
−
| 6
 +
|2
−
| 7.2
 +
|2.250
−
| 0.305
 +
|3.260
  +
|150
−
| 140
  
  +
|Carbon. Must sweep beam. 1Å/sec (fluctuating 0.4–0.9Å/sec) at ~1.4–1.6 emission.
−
| Do not evaporate more than 200Å of Cr in the E-Beam evaporator.
  
  +
|-
  +
|Co
  +
| 2
  +
| C
  +
| 1
  +
| 8.9
  +
| 0.343
  +
| 150
  +
| '''Use only with permission'''
 
|-
  
|-
 
| Fe
  
| Fe
Line 86: Line 106:
 
| 130
  
| 130
 
|
 
|
  +
|-
  +
| Gd
  +
| 3
  +
| H
  +
| 3
  +
| 7.89
  +
| 0.670
  +
| 120
  +
|'''Use only with permission'''
  +
|
 
|-
  
|-
 
| MgO
  
| MgO
Line 94: Line 124:
 
| 0.411
  
| 0.411
 
|
 
|
  +
| '''Use only with permission'''
−
|
 
 
|-
  
|-
 
| Mo
  
| Mo
Line 102: Line 132:
 
| 10.2
  
| 10.2
 
| 0.257
  
| 0.257
−
|
+
| 140
 
|
 
|
 
|-
  
|-
Line 118: Line 148:
 
| H
  
| H
 
| 6
  
| 6
−
| 8.23
 +
| 8.50
−
| 0.321
 +
| 0.3258
 
|
 
|
−
| Density 8.52, z ratio 0.3258
 +
| Density and z-ratio for Nichrome IV
 
|-
  
|-
 
| Nb
  
| Nb
Line 149: Line 179:
 
| 140
  
| 140
 
| Prone to spitting. Evaporate at 1.5Å/sec or less.
  
| Prone to spitting. Evaporate at 1.5Å/sec or less.
  +
|-
  +
| Ru
  +
| 1
  +
| C
  +
| 6
  +
| 12.362
  +
| 0.182
  +
| 142
  +
| Prone to spitting. Evaporate at 1.0Å/sec or less. Cool down for 20 minutes before venting.
 
|-
  
|-
 
| Si
  
| Si
Line 166: Line 205:
 
| 0.87
  
| 0.87
 
| 132
  
| 132
  +
| '''Use only with permission'''
−
|
 
 
|-
  
|-
 
| SiO<sub>2</sub>
  
| SiO<sub>2</sub>
Line 172: Line 211:
 
| C
  
| C
 
| 6
  
| 6
−
| 2.2 ( should be 2.648)
 +
| 2.648
  +
| 1.00
−
| 1.07 ( should be 1.000)
  
 
| 140
  
| 140
  +
| '''Use only with permission.'''
−
| Please change the crystal and the upper mirror after evaporating oxide.
  
  +
Please change the crystal and the upper mirror after evaporating oxide. Density 2.2-2.7 according to thin film dep. table.
 
|-
  
|-
 
| SrF<sub>2</sub>
  
| SrF<sub>2</sub>
Line 184: Line 224:
 
| 0.727
  
| 0.727
 
| 140
  
| 140
  +
| '''Use only with permission'''
−
|
 
 
|-
  
|-
 
| Ta
  
| Ta
Line 193: Line 233:
 
| 0.262
  
| 0.262
 
|
 
|
−
| Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call me before you try Ta.
 +
| Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call maintainer before you try Ta.
 
|-
  
|-
 
| W
  
| W
Line 216: Line 256:
 
=[[E-Beam 2 (Custom)]]=
  
=[[E-Beam 2 (Custom)]]=
 
==Materials Table (E-Beam #2)==
  
==Materials Table (E-Beam #2)==
−
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable"
 +
{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
−
|-
  
−
! colspan=5 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div>
  
 
|- bgcolor="#D0E7FF"
 
|- bgcolor="#D0E7FF"
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Material'''
+
! width="45" align="center" bgcolor="#D0E7FF" | '''Material'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3'''
+
! width="45" align="center" bgcolor="#D0E7FF" | '''Density, g/cm3'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio'''
+
! width="45" align="center" bgcolor="#D0E7FF" | '''Z Ratio'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling factor, %'''
+
! width="45" align="center" bgcolor="#D0E7FF" | '''Tooling factor, %'''
−
! width="100" bgcolor="#D0E7FF" align="center" | '''Comments'''
 +
! width="100" align="center" bgcolor="#D0E7FF" | '''Comments'''
 
|-
  
|-
 
|Al<sub>2</sub>O<sub>3</sub>
  
|Al<sub>2</sub>O<sub>3</sub>
Line 231: Line 269:
 
|140.0
  
|140.0
 
|Tony could you please check this?
  
|Tony could you please check this?
  +
|-
  +
|CeO<sub>2</sub>
  +
|7.13
  +
|1.000
  +
|252.0
  +
|Deposition at room temperature (see the details in the following file)
  +
|-
  +
|CeO<sub>2</sub>
  +
|7.13
  +
|1.000
  +
|117.0
  +
|Deposition at 200 C (see the details in the following file)
  +
|-
  +
|CeO<sub>2</sub>
  +
|7.13
  +
|1.000
  +
|99.7
  +
|Deposition at 250 C (see the details in the following file)
 
|-
  
|-
 
|GeO<sub>2</sub>
  
|GeO<sub>2</sub>
Line 239: Line 295:
 
|-
  
|-
 
|ITO
  
|ITO
−
|7.16
 +
|6.43-7.14
 
|1.000
  
|1.000
 
|139.0
  
|139.0
  +
|z ratio unknown
−
|Density should be 6.43-7.14, z ratio?
  
 
|-
  
|-
 
|MgO
  
|MgO
Line 257: Line 313:
 
|-
  
|-
 
|SiO<sub>2</sub>
  
|SiO<sub>2</sub>
−
|2.20
 +
|2.648
−
|1.070
 +
|1.000
 
|157.6
  
|157.6
  +
|Density 2.2-2.7 according to thin film deposition tables
−
|Should be 2.648, z ratio 1.000
  
 
|-
  
|-
 
|SiO<sub>x</sub>
  
|SiO<sub>x</sub>
Line 287: Line 343:
 
|-
  
|-
 
|}
  
|}
  +
  +
==ITO deposition (E-Beam 2)==
  +
*[[media:Rapid Thermal Annealing on Room-temperature grown ITO.pdf|Room-temperature ITO Deposition, Annealing, and Electrical and Optical Properties]]
  +
*[[media:ITO film-200C-O2-35sccm-EBeam2.pdf|ITO Deposition at 200 C]]
  +
  +
==CeO<sub>2</sub> deposition (E-Beam 2)==
  +
*[[media:CeO2 Deposition-EBeam2.pdf|Room- and High-temperature CeO<sub>2</sub> Depositions with and without an Additional Oxygen Gas Flow]]
   
 
=[[E-Beam 3 (Temescal)]]=
  
=[[E-Beam 3 (Temescal)]]=
 
==Materials Table (E-Beam #3)==
  
==Materials Table (E-Beam #3)==
  +
''The following materials are always installed in the evaporator. There are 4 materials available on each gun (front/rear guns), allowing for co-deposition by running both guns simultaneously.''
−
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible wikitable"
  
  +
{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
 
|-
  
|-
−
! colspan=9 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div>
  
 
|- bgcolor="#D0E7FF"
 
|- bgcolor="#D0E7FF"
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Material'''
+
! width="45" align="center" bgcolor="#D0E7FF" | '''Material'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Gun'''
+
! width="45" align="center" bgcolor="#D0E7FF" | '''Gun'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Hearth /Crucible'''
+
! width="45" align="center" bgcolor="#D0E7FF" | '''Hearth /Crucible'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Process Gain, A/sec/%pwr'''
+
! width="45" align="center" bgcolor="#D0E7FF" | '''Process Gain, A/sec/%pwr'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Film Number'''
+
! width="45" align="center" bgcolor="#D0E7FF" | '''Film Number'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3'''
+
! width="45" align="center" bgcolor="#D0E7FF" | '''Density, g/cm3'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio'''
+
! width="45" align="center" bgcolor="#D0E7FF" | '''Z Ratio'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling, %'''
+
! width="45" align="center" bgcolor="#D0E7FF" | '''Tooling, %'''
−
! width="100" bgcolor="#D0E7FF" align="center" | '''Comments'''
 +
! width="100" align="center" bgcolor="#D0E7FF" | '''Comments'''
−
|-
  
−
|Ag
  
−
| Rear
  
−
| C
  
−
| 10.0
  
−
| 2
  
−
|10.50
  
−
| 0.529
  
−
| 67
  
−
|
  
−
|-
  
−
| Al
  
−
| Rear
  
−
| C
  
−
| 10.0
  
−
| 1
  
−
|2.70
  
−
| 1.080
  
−
| 53
  
−
|
  
 
|-
  
|-
 
| Au
  
| Au
Line 332: Line 375:
 
| 0.381
  
| 0.381
 
| 56
  
| 56
−
|
  
−
|-
  
−
| Ge
  
−
| Rear
  
−
| C
  
−
| 10.0
  
−
| 3
  
−
|5.35
  
−
| 0.516
  
−
| 80
  
 
|
  
|
 
|-
  
|-
Line 352: Line 385:
 
| 0.331
  
| 0.331
 
| 67
  
| 67
−
|
  
−
|-
  
−
| Pd
  
−
| Rear
  
−
| C
  
−
| 0.9
  
−
| 4
  
−
|12.038
  
−
| 0.357
  
−
| 48
  
 
|
  
|
 
|-
  
|-
Line 384: Line 407:
 
|
  
|
 
|-
  
|-
−
| Si
 +
|Ag
−
|
+
| Rear
−
|
+
| C
 
| 10.0
  
| 10.0
−
|
+
| 2
−
|2.32
 +
|10.50
−
| 0.712
 +
| 0.529
−
| 100
 +
| 67
  +
|
−
|Not available
  
  +
|-
  +
| Al
  +
| Rear
  +
| C
  +
| 10.0
  +
| 1
  +
|2.70
  +
| 1.080
  +
| 53
  +
|
  +
|-
  +
| Ge
  +
| Rear
  +
| C
  +
| 10.0
  +
| 3
  +
|5.35
  +
| 0.516
  +
| 80
  +
|
  +
|-
  +
| Pd
  +
| Rear
  +
| C
  +
| 0.9
  +
| 4
  +
|12.038
  +
| 0.357
  +
| 48
  +
|
 
|-
  
|-
 
|}
  
|}
  +
 
=[[E-Beam 4 (CHA)]]=
  
=[[E-Beam 4 (CHA)]]=
 
==Materials Table (E-Beam #4)==
  
==Materials Table (E-Beam #4)==
−
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible wikitable"
 +
{| class="wikitable sortable collapsible" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
−
|-
  
−
! colspan=6 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div>
  
 
|- bgcolor="#D0E7FF"
 
|- bgcolor="#D0E7FF"
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Material'''
+
! width="45" align="center" bgcolor="#D0E7FF" | '''Material'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3'''
+
! width="45" align="center" bgcolor="#D0E7FF" | '''Density, g/cm3'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio'''
+
! width="45" align="center" bgcolor="#D0E7FF" | '''Z Ratio'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Master tooling, %'''
+
! width="45" align="center" bgcolor="#D0E7FF" | '''Master tooling, %'''
−
! width="45" bgcolor="#D0E7FF" align="center" | '''Process Gain, A/sec/%pwr'''
 +
! width="45" align="center" bgcolor="#D0E7FF" | '''Process Gain, A/sec/%pwr'''
−
! width="100" bgcolor="#D0E7FF" align="center" | '''Comments'''
 +
! width="100" align="center" bgcolor="#D0E7FF" | '''Comments'''
 
|-
  
|-
 
|Ag
  
|Ag
Line 413: Line 465:
 
|110
  
|110
 
|10.0
  
|10.0
  +
|
−
|Tony, could you please check this?
  
 
|-
  
|-
 
|Al
  
|Al
Line 479: Line 531:
 
|-
  
|-
 
|NiCr
  
|NiCr
−
|8.23
 +
|8.50
−
| 0.321
 +
| 0.3258
 
|140
  
|140
 
|10.0
  
|10.0
−
|density should be 8.50, z ratio 0.3258
 +
|density and z ratio for Nichrome IV
 
|-
  
|-
 
|NiFe
  
|NiFe

Revision as of 14:10, 3 April 2018

Back to Vacuum Deposition Recipes.

Vapor Pressure Chart and Materials Deposition Table

Aluminum Deposition

E-Beam 1 (Sharon)

Ar-Ion Beam Source

Materials Table (E-Beam #1)

There are four hearth "positions" able to be loaded at any one time, meaning only up to 4 materials can be evaporated without breaking vacuum. Now able to handle Four-4" wafers in one run.

Material Position Hearth / Crucible Film Number Density Z Ratio Tooling Comments
Ag 4 C 5 10.5 0.529 140
Al 2 C 6 2.7 1.080 118
Al2O3 1 C 6 3.97 0.336 169
Au 4 C 4 19.3 0.381 138 Bazookas can be used at 20-30Å/sec.
AuGe 3 C 5 17.63 0.397 151 Composition unpredictable unless you practically empty the crucible.
C 2 H 2 2.250 3.260 150 Carbon. Must sweep beam. 1Å/sec (fluctuating 0.4–0.9Å/sec) at ~1.4–1.6 emission.
Co 2 C 1 8.9 0.343 150 Use only with permission
Fe 7.86 0.349
Ge 3 C 6 5.35 0.516 130
Gd 3 H 3 7.89 0.670 120 Use only with permission
MgO 1 6 3.58 0.411 Use only with permission
Mo 10.2 0.257 140
Ni 1 H 1 8.91 0.331 140 Prone to spitting. Cool down for 15 minutes before venting.
NiCr 1 H 6 8.50 0.3258 Density and z-ratio for Nichrome IV
Nb 4 C 6 8.57 0.516 ( should be 0.492) Cool down for at least 35 minutes before venting.
Pd 1 H 9 12.0 0.357 140
Pt 1 C 8 21.40 0.245 140 Prone to spitting. Evaporate at 1.5Å/sec or less.
Ru 1 C 6 12.362 0.182 142 Prone to spitting. Evaporate at 1.0Å/sec or less. Cool down for 20 minutes before venting.
Si 2 H 2 2.32 0.712 150 Cool down very slowly after evaporating lest you crack the source.
SiO C 6 2.13 0.87 132 Use only with permission
SiO2 1 C 6 2.648 1.00 140 Use only with permission.

Please change the crystal and the upper mirror after evaporating oxide. Density 2.2-2.7 according to thin film dep. table.

SrF2 1 C 6 4.28 0.727 140 Use only with permission
Ta 1 H 6 16.6 0.262 Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call maintainer before you try Ta.
W 1 C 6 19.3 0.163 138
Ti 3 H 3 4.50 0.628 139

E-Beam 2 (Custom)

Materials Table (E-Beam #2)

Material Density, g/cm3 Z Ratio Tooling factor, % Comments
Al2O3 3.97 0.336 140.0 Tony could you please check this?
CeO2 7.13 1.000 252.0 Deposition at room temperature (see the details in the following file)
CeO2 7.13 1.000 117.0 Deposition at 200 C (see the details in the following file)
CeO2 7.13 1.000 99.7 Deposition at 250 C (see the details in the following file)
GeO2 6.24 1.000 139.0
ITO 6.43-7.14 1.000 139.0 z ratio unknown
MgO 3.58 0.411 157.6 OK
Si 2.32 0.712 150.0
SiO2 2.648 1.000 157.6 Density 2.2-2.7 according to thin film deposition tables
SiOx 2.13 0.87 130.0
SrF2 4.28 0.727 140.0
Ta2O5 8.2 0.30 157.6
TiO2 4.26 0.400 139.0

ITO deposition (E-Beam 2)

CeO2 deposition (E-Beam 2)

E-Beam 3 (Temescal)

Materials Table (E-Beam #3)

The following materials are always installed in the evaporator. There are 4 materials available on each gun (front/rear guns), allowing for co-deposition by running both guns simultaneously.

Material Gun Hearth /Crucible Process Gain, A/sec/%pwr Film Number Density, g/cm3 Z Ratio Tooling, % Comments
Au Front C 2.0 3 19.30 0.381 56
Ni Front C 0.5 2 8.91 0.331 67
Pt Front C 0.4 1 21.40 0.245 67
Ti Front C 5.0 4 4.50 0.628 67
Ag Rear C 10.0 2 10.50 0.529 67
Al Rear C 10.0 1 2.70 1.080 53
Ge Rear C 10.0 3 5.35 0.516 80
Pd Rear C 0.9 4 12.038 0.357 48

E-Beam 4 (CHA)

Materials Table (E-Beam #4)

Material Density, g/cm3 Z Ratio Master tooling, % Process Gain, A/sec/%pwr Comments
Ag 10.50 0.529 110 10.0
Al 2.70 1.080 165 6.0
Au 19.30 0.381 120 10.0
Co 8.90 0.343 150 5.0
Cr 7.20 0.305 140 10.0
Fe 7.86 0.349 165 10.0
Ge 5.35 0.516 126 10.0
Hf 13.09 0.360 150 10.0
Ir 22.40 0.129 130 10.0
Ni 8.91 0.331 150 5.0
NiCr 8.50 0.3258 140 10.0 density and z ratio for Nichrome IV
NiFe 8.70 1.000 100 10.0
Pd 12.038 0.357 112 10.0
Pt 21.40 0.245 130 10.0
Ru 12.362 0.182 100 10.0
Ti 4.50 0.628 183 10.0
Zr 6.49 0.600 150 10.0
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