Difference between revisions of "Dry Etching Recipes"

From UCSB Nanofab Wiki
Jump to: navigation, search
Line 344: Line 344:
 
|
 
|
 
|
 
|
  +
|{{rl|ICP Etching Recipes|AlGaAs Etch (Panasonic 1)}}
|
 
 
|
 
|
 
|
 
|

Revision as of 11:02, 2 October 2013