Difference between revisions of "Dry Etching Recipes"
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(ICP2 AL2O3 R link) |
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{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1" |
{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1" |
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− | ! |
+ | ! colspan="17" width="725" height="45" | <div style="font-size: 150%;">Dry Etching Recipes</div> |
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| <!-- INTENTIONALLY LEFT BLANK --> |
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− | ! width="300" height="35" align="center" bgcolor="#d0e7ff |
+ | ! colspan="4" width="300" height="35" align="center" bgcolor="#d0e7ff" | '''[[RIE Etching Recipes|RIE Etching]]''' |
! colspan="5" |'''[[ICP Etching Recipes|ICP Etching]]''' |
! colspan="5" |'''[[ICP Etching Recipes|ICP Etching]]''' |
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− | ! align="center" bgcolor="#d0e7ff |
+ | ! colspan="4" align="center" bgcolor="#d0e7ff" |'''[[Oxygen Plasma System Recipes|Oxygen Plasma Systems]]''' |
− | ! align="center" bgcolor="#d0e7ff |
+ | ! colspan="3" align="center" bgcolor="#d0e7ff" |'''[[Other Dry Etching Recipes|Other Dry Etchers]]''' |
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! width="65" align="center" bgcolor="#d0e7ff" | '''Material''' |
! width="65" align="center" bgcolor="#d0e7ff" | '''Material''' |
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+ | |[https://www.nanotech.ucsb.edu/wiki/index.php/TEST_PAGE?venotify=created TEST] |
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Revision as of 09:31, 6 April 2018
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.