Difference between revisions of "Dry Etching Recipes"
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(added space to ICP1/2 recipe links, hopefully fixes targeted links) |
(Added "hptotoresist & ARC" row, with A recipes) |
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| {{rl|ICP Etching Recipes|Si Etch (PlasmaTherm/Bosch Etch)}} |
| {{rl|ICP Etching Recipes|Si Etch (PlasmaTherm/Bosch Etch)}} |
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+ | !Photoresist |
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+ | & ARC |
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! bgcolor="#D0E7FF" align="center" | SiC |
! bgcolor="#D0E7FF" align="center" | SiC |
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| {{rl|ICP Etching Recipes|SiNx Etching (Panasonic 2)}} |
| {{rl|ICP Etching Recipes|SiNx Etching (Panasonic 2)}} |
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Revision as of 13:01, 8 January 2018
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.