Difference between revisions of "Dry Etching Recipes"

From UCSB Nanofab Wiki
Jump to: navigation, search
Line 331: Line 331:
 
|
 
|
 
|
 
|
  +
| {{rl|ICP Etching Recipes|GaAs Etch (Unaxis VLR)}}
|
 
 
|
 
|
 
|
 
|

Revision as of 13:44, 2 October 2013