Difference between revisions of "Dry Etching Recipes"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 212: Line 212:
 
|  
 
|  
 
| {{rl|ICP Etching Recipes|SIO2Etch(Panasonic 1)}}
 
| {{rl|ICP Etching Recipes|SIO2Etch(Panasonic 1)}}
|  
+
| {{rl|ICP Etching Recipes|SIO2Etch(Panasonic 2)}}
 
|  
 
|  
 
|  
 
|  

Revision as of 11:22, 30 August 2013