Difference between revisions of "Dry Etching Recipes"

Revision as of 16:44, 28 January 2014

R = Recipe is available. Clicking this link will take you to the recipe.

Dry Etching Recipes
	RIE Etching				ICP Etching				Oxygen Plasma Systems				Other Dry Etchers
Material	RIE 1 (Custom)	RIE 2 (MRC)	RIE 3 (MRC)	RIE 5 (PlasmaTherm)	Si Deep RIE (PlasmaTherm/Bosch Etch)	ICP Etch 1 (Panasonic E626I)	ICP Etch 2 (Panasonic E640)	ICP-Etch (Unaxis VLR)	Ashers (Technics PEII)	Plasma Clean (Gasonics 2000)	UV Ozone Reactor	Plasma Activation (EVG 810)	XeF2 Etch (Xetch)	Vapor HF Etch (uETCH)
Al						R	R
Ti						R	A
Cr				A		R	A
Ge
Ag
Ru
Mo
Ta
W-TiW						R	A
Al₂O₃
HfO₂
ITo		R
SiO₂						R	R
SiN						R	R
SiOxNy
Ta₂O₅
TiO₂
TiN
ZnO₂
ZrO₂
GaAs				R		R	R	R
AlGaAs				R		R		R
InGaAlAs		R						R
InGaAsP		R
InP		R						R
GaN				R		R		R
AlGaN
AlN
GaN
AlGaN
AlN
GaSb
CdZnTe		R
ZnSe
Si					R								R
SiC						R	A
Sapphire						R	A
Material	RIE 1 (Custom)	RIE 2 (MRC)	RIE 3 (MRC)	RIE 5 (PlasmaTherm)	Si Deep RIE (PlasmaTherm/Bosch Etch)	ICP Etch 1 (Panasonic E626I)	ICP Etch 2 (Panasonic E640)	ICP-Etch (Unaxis VLR)	Ashers (Technics PEII)	Plasma Clean (Gasonics 2000)	UV Ozone Reactor	Plasma Activation (EVG 810)	XeF2 Etch (Xetch)

@@ Line 278: / Line 278: @@
 |
 |
+|
 |-bgcolor ="#EEFFFF"
 ! bgcolor="#D0E7FF" align="center" | TiO<sub>2</sub>
@@ Line 292: / Line 293: @@
 |
 |
+|
 |
 |-
@@ Line 307: / Line 309: @@
 |
 |
+|
 |
 |-bgcolor ="#EEFFFF"
@@ Line 322: / Line 325: @@
 |
 |
+|
 |
 |-
@@ Line 337: / Line 341: @@
 |
 |
+|
 |
 |-bgcolor ="#EEFFFF"
@@ Line 352: / Line 357: @@
 |
 |
+|
 |
 |-
@@ Line 367: / Line 373: @@
 |
 |
+|
 |
 |-bgcolor ="#EEFFFF"
@@ Line 382: / Line 389: @@
 |
 |
+|
 |
 |-
@@ Line 397: / Line 405: @@
 |
 |
+|
 |
 |-bgcolor ="#EEFFFF"
@@ Line 412: / Line 421: @@
 |
 |
+|
 |
 |-
@@ Line 427: / Line 437: @@
 |
 |
+|
 |
 |-bgcolor ="#EEFFFF"
@@ Line 442: / Line 453: @@
 |
 |
+|
 |
 |-
@@ Line 457: / Line 469: @@
 |
 |
+|
 |
 |-bgcolor ="#EEFFFF"
@@ Line 472: / Line 485: @@
 |
 |
+|
 |
 |-
@@ Line 487: / Line 501: @@
 |
 |
+|
 |
 |-bgcolor ="#EEFFFF"
@@ Line 502: / Line 517: @@
 |
 |
+|
 |
 |-
@@ Line 517: / Line 533: @@
 |
 |
+|
 |
 |-bgcolor ="#EEFFFF"
@@ Line 532: / Line 549: @@
 |
 |
+|
 |
 |-