Difference between revisions of "Dry Etching Recipes"

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|{{rl|RIE Etching Recipes|AlGaAs Etch (RIE 5)}}
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|{{rl|ICP Etching Recipes|AlGaAs Etch (Panasonic 1)}}
 
|{{rl|ICP Etching Recipes|AlGaAs Etch (Panasonic 1)}}

Revision as of 11:29, 2 October 2013