Difference between revisions of "Dry Etching Recipes"

From UCSB Nanofab Wiki
Jump to: navigation, search
Line 546: Line 546:
 
|
 
|
 
|
 
|
| {{rl|Other Dry Etching Recipes|Other Dry Etch (Unaxis VLR)}}
+
| {{rl|Other Dry Etching Recipes|Other Dry Etch (XeF2 Etcher)}}
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | SiC
 
! bgcolor="#D0E7FF" align="center" | SiC

Revision as of 09:44, 24 September 2013