Difference between revisions of "Dry Etching Recipes"
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(link to etching process control data, new heading levels for the huge table) |
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− | === |
+ | ===<u>[[Process Group - Process Control Data#Etching .28Process Control Data.29|Process Control Data]]</u>=== |
− | See [[Process Group - Process Control Data#Etching .28Process Control Data.29|linked page]] for [https://en.wikipedia.org/wiki/Statistical_process_control process control data] ( |
+ | <small>''See [[Process Group - Process Control Data#Etching .28Process Control Data.29|linked page]] for [https://en.wikipedia.org/wiki/Statistical_process_control process control data] (dep rate/stress etc. over time), for a selection of often-used thin-film depositions.''</small> |
− | === |
+ | ===Dry Etching Tools/Materials Table=== |
+ | |||
− | {{Recipe Table Explanation}} |
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+ | * <small>'''R''': ''Recipe is available. Clicking this link will take you to the recipe.''</small> |
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+ | * <small>'''A''': ''Material is available for use, but no recipes are provided.''</small> |
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{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1" |
{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1" |
Revision as of 15:46, 7 July 2022
Process Control Data
See linked page for process control data (dep rate/stress etc. over time), for a selection of often-used thin-film depositions.
Dry Etching Tools/Materials Table
- R: Recipe is available. Clicking this link will take you to the recipe.
- A: Material is available for use, but no recipes are provided.