Difference between revisions of "Dry Etching Recipes"

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(minor edit)
(delete RIE1)
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{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
 
{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
 
|- bgcolor="#d0e7ff"
 
|- bgcolor="#d0e7ff"
! colspan="18" width="725" height="45" |<div style="font-size: 150%;">Dry Etching Recipes</div>
+
! colspan="17" width="725" height="45" |<div style="font-size: 150%;">Dry Etching Recipes</div>
 
|- bgcolor="#d0e7ff"
 
|- bgcolor="#d0e7ff"
 
|<!-- INTENTIONALLY LEFT BLANK -->
 
|<!-- INTENTIONALLY LEFT BLANK -->
! colspan="4" width="300" height="35" align="center" bgcolor="#d0e7ff" |'''[[RIE Etching Recipes|RIE Etching]]'''
+
! colspan="3" |'''[[RIE Etching Recipes|RIE Etching]]'''
 
! colspan="5" |'''[[ICP Etching Recipes|ICP Etching]]'''
 
! colspan="5" |'''[[ICP Etching Recipes|ICP Etching]]'''
 
! colspan="5" align="center" bgcolor="#d0e7ff" |'''[[Oxygen Plasma System Recipes|Oxygen Plasma Systems]]'''
 
! colspan="5" align="center" bgcolor="#d0e7ff" |'''[[Oxygen Plasma System Recipes|Oxygen Plasma Systems]]'''
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|-
 
|-
 
! width="65" align="center" bgcolor="#d0e7ff" |'''Material'''
 
! width="65" align="center" bgcolor="#d0e7ff" |'''Material'''
| width="65" bgcolor="#daf1ff" |[[RIE 1 (Custom)|RIE 1<br>(Retired)]]
 
 
| width="65" bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_2_.28MRC.29|RIE 2<br> (MRC)]]
 
| width="65" bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_2_.28MRC.29|RIE 2<br> (MRC)]]
 
| width="65" bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_3_.28MRC.29|RIE 3<br> (MRC)]]
 
| width="65" bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_3_.28MRC.29|RIE 3<br> (MRC)]]
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! align="center" bgcolor="#d0e7ff" |Ag
 
! align="center" bgcolor="#d0e7ff" |Ag
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! align="center" bgcolor="#d0e7ff" |Al
 
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! align="center" bgcolor="#d0e7ff" |Au
 
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! align="center" bgcolor="#d0e7ff" |Cr
 
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! align="center" bgcolor="#d0e7ff" |Cu
 
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! align="center" bgcolor="#d0e7ff" |Mo
 
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! align="center" bgcolor="#d0e7ff" |Ni
 
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! align="center" bgcolor="#d0e7ff" |Pt
 
! align="center" bgcolor="#d0e7ff" |Pt
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! align="center" bgcolor="#d0e7ff" |Ru
 
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! align="center" bgcolor="#d0e7ff" |Si
 
! align="center" bgcolor="#d0e7ff" |Si
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! align="center" bgcolor="#d0e7ff" |Ta
 
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! align="center" bgcolor="#d0e7ff" |Al<sub>2</sub>O<sub>3</sub>
 
! align="center" bgcolor="#d0e7ff" |Al<sub>2</sub>O<sub>3</sub>
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! align="center" bgcolor="#d0e7ff" |Al<sub>2</sub>O<sub>3 (Sapphire)</sub>
 
! align="center" bgcolor="#d0e7ff" |Al<sub>2</sub>O<sub>3 (Sapphire)</sub>
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! align="center" bgcolor="#d0e7ff" |AlGaAs
 
! align="center" bgcolor="#d0e7ff" |AlGaAs
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! align="center" bgcolor="#d0e7ff" |AlGaN
 
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! align="center" bgcolor="#d0e7ff" |AlN
 
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! align="center" bgcolor="#d0e7ff" |CdZnTe
 
! align="center" bgcolor="#d0e7ff" |CdZnTe
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|{{rl|RIE Etching Recipes|CdZnTe Etch (RIE 2)}}
 
|{{rl|RIE Etching Recipes|CdZnTe Etch (RIE 2)}}
 
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! align="center" bgcolor="#d0e7ff" |GaAs
 
! align="center" bgcolor="#d0e7ff" |GaAs
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! align="center" bgcolor="#d0e7ff" |GaN
 
! align="center" bgcolor="#d0e7ff" |GaN
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! align="center" bgcolor="#d0e7ff" |GaSb
 
! align="center" bgcolor="#d0e7ff" |GaSb
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! align="center" bgcolor="#d0e7ff" |HfO<sub>2</sub>
 
! align="center" bgcolor="#d0e7ff" |HfO<sub>2</sub>
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! align="center" bgcolor="#d0e7ff" |InGaAlAs
 
! align="center" bgcolor="#d0e7ff" |InGaAlAs
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|{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}}
 
|{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}}
 
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! align="center" bgcolor="#d0e7ff" |InGaAsP
 
! align="center" bgcolor="#d0e7ff" |InGaAsP
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|{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}}
 
|{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}}
 
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! align="center" bgcolor="#d0e7ff" |InP
 
! align="center" bgcolor="#d0e7ff" |InP
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|{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}}
 
|{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}}
 
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! align="center" bgcolor="#d0e7ff" |ITO
 
! align="center" bgcolor="#d0e7ff" |ITO
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|{{rl|RIE Etching Recipes|ITO Etch (RIE 2)}}
 
|{{rl|RIE Etching Recipes|ITO Etch (RIE 2)}}
 
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!Photoresist
 
!Photoresist
 
& ARC
 
& ARC
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|A
 
|A
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! align="center" bgcolor="#d0e7ff" |SiC
 
! align="center" bgcolor="#d0e7ff" |SiC
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! align="center" bgcolor="#d0e7ff" |SiN
 
! align="center" bgcolor="#d0e7ff" |SiN
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|{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiN<sub>x</sub> Etching (RIE 3)}}
 
|{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiN<sub>x</sub> Etching (RIE 3)}}
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! align="center" bgcolor="#d0e7ff" |SiO<sub>2</sub>
 
! align="center" bgcolor="#d0e7ff" |SiO<sub>2</sub>
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|{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiO<sub>2</sub> Etching (RIE 3)}}
 
|{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiO<sub>2</sub> Etching (RIE 3)}}
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! align="center" bgcolor="#d0e7ff" |SiOxNy
 
! align="center" bgcolor="#d0e7ff" |SiOxNy
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! align="center" bgcolor="#d0e7ff" |Ta<sub>2</sub>O<sub>5</sub>
 
! align="center" bgcolor="#d0e7ff" |Ta<sub>2</sub>O<sub>5</sub>
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! align="center" bgcolor="#d0e7ff" |TiN
 
! align="center" bgcolor="#d0e7ff" |TiN
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! align="center" bgcolor="#d0e7ff" |TiO<sub>2</sub>
 
! align="center" bgcolor="#d0e7ff" |TiO<sub>2</sub>
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! align="center" bgcolor="#d0e7ff" |W-TiW
 
! align="center" bgcolor="#d0e7ff" |W-TiW
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! align="center" bgcolor="#d0e7ff" |ZnO<sub>2</sub>
 
! align="center" bgcolor="#d0e7ff" |ZnO<sub>2</sub>
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! align="center" bgcolor="#d0e7ff" |ZnS
 
! align="center" bgcolor="#d0e7ff" |ZnS
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|{{rl|RIE Etching Recipes|ZnS Etching (RIE 2)}}
 
|{{rl|RIE Etching Recipes|ZnS Etching (RIE 2)}}
 
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! align="center" bgcolor="#d0e7ff" |ZnSe
 
! align="center" bgcolor="#d0e7ff" |ZnSe
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|{{rl|RIE Etching Recipes|ZnS Etching (RIE 2)}}
 
|{{rl|RIE Etching Recipes|ZnS Etching (RIE 2)}}
 
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! align="center" bgcolor="#d0e7ff" |ZrO<sub>2</sub>
 
! align="center" bgcolor="#d0e7ff" |ZrO<sub>2</sub>
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! align="center" bgcolor="#d0e7ff" |'''Material'''
 
! align="center" bgcolor="#d0e7ff" |'''Material'''
| bgcolor="#daf1ff" |[[RIE 1 (Custom)|RIE 1<br>(Retired)]]
 
 
| bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_2_.28MRC.29|RIE 2<br> (MRC)]]
 
| bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_2_.28MRC.29|RIE 2<br> (MRC)]]
 
| bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_3_.28MRC.29|RIE 3<br> (MRC)]]
 
| bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_3_.28MRC.29|RIE 3<br> (MRC)]]

Revision as of 21:27, 16 September 2019

  • R = Recipe is available. Clicking this link will take you to the recipe.
  • A = Material is available for use, but no recipes are provided.
Dry Etching Recipes
RIE Etching ICP Etching Oxygen Plasma Systems Other Dry Etchers
Material RIE 2
(MRC)
RIE 3
(MRC)
RIE 5
(PlasmaTherm)
DSEIII
(PlasmaTherm)
SLR Fluorine ICP (PlasmaTherm) ICP Etch 1
(Panasonic 1)
ICP Etch 2
(Panasonic 2)
ICP-Etch
(Unaxis VLR)
Ashers
(Technics PEII)
Plasma Clean
(Gasonics 2000)
Plasma Clean (YES EcoClean) UV Ozone Reactor Plasma Activation
(EVG 810)
XeF2 Etch
(Xetch)
Vapor HF Etch
(uETCH)
CAIBE
(Oxford)
Ag A
Al A R R A
Au R
Cr A R A A
Cu A
Ge A A
Mo A
Ni R
Pt R
Ru A R A
Si R R R A
Ta A
Ti R A A
Al2O3 R A
Al2O3 (Sapphire) R A A
AlGaAs R R R A
AlGaN R A
AlN R A
CdZnTe R A
GaAs R R R R A
GaN R R R A
GaSb A R A
HfO2 A
InGaAlAs R R A
InGaAsP R R A
InP R A A R A
ITO R A
Photoresist

& ARC

A R R R A A A A
SiC R A A
SiN R R R A A
SiO2 R A R R R A
SiOxNy A A A
Ta2O5 A A
TiN A
TiO2 A
W-TiW R A A
ZnO2 A
ZnS R A
ZnSe R A
ZrO2 A
Material RIE 2
(MRC)
RIE 3
(MRC)
RIE 5
(PlasmaTherm)
DSEIII
(PlasmaTherm)
SLR Fluorine ICP (PlasmaTherm) ICP Etch 1
(Panasonic E626I)
ICP Etch 2
(Panasonic E640)
ICP-Etch
(Unaxis VLR)
Ashers
(Technics PEII)
Plasma Clean
(Gasonics 2000)
Plasma Clean (YES EcoClean) UV Ozone Reactor Plasma Activation
(EVG 810)
XeF2 Etch
(Xetch)
Vapor HF Etch
(uETCH)
CAIBE
(Oxford)