Difference between revisions of "Dry Etching Recipes"

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m (Reverted edits by John d (talk) to last revision by Thibeault)
(added space to ICP1/2 recipe links, hopefully fixes targeted links)
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| {{rl|ICP Etching Recipes|Al Etch(Panasonic 1)}}
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| {{rl|ICP Etching Recipes|Al Etch (Panasonic 1)}}
| {{rl|ICP Etching Recipes|Al Etch(Panasonic 2)}}
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| {{rl|ICP Etching Recipes|Al Etch (Panasonic 2)}}
 
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| {{rl|ICP Etching Recipes|Cr Etch(Panasonic 1)}}
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| {{rl|ICP Etching Recipes|Cr Etch (Panasonic 1)}}
 
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| {{rl|ICP Etching Recipes|Ti Etch(Panasonic 1)}}
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| {{rl|ICP Etching Recipes|Ti Etch (Panasonic 1)}}
 
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| {{rl|ICP Etching Recipes|Sapphire Etch(Panasonic 1)}}
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| {{rl|ICP Etching Recipes|Sapphire Etch (Panasonic 1)}}
 
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| {{rl|ICP Etching Recipes|SiC Etch(Panasonic 1)}}
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| {{rl|ICP Etching Recipes|SiC Etch (Panasonic 1)}}
 
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| {{rl|ICP Etching Recipes|SINxEtch(Panasonic 1)}}
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| {{rl|ICP Etching Recipes|SiNx Etching (Panasonic 1)}}
| {{rl|ICP Etching Recipes|SINxEtch(Panasonic 2)}}
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| {{rl|ICP Etching Recipes|SiNx Etching (Panasonic 2)}}
 
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| {{rl|ICP Etching Recipes|SIO2Etch(Panasonic 1)}}
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| {{rl|ICP Etching Recipes|SiO2 Etching (Panasonic 1)}}
| {{rl|ICP Etching Recipes|SIO2Etch(Panasonic 2)}}
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| {{rl|ICP Etching Recipes|SiO2 Etching (Panasonic 2)}}
 
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| {{rl|ICP Etching Recipes|W-TiW Etch(Panasonic 1)}}
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| {{rl|ICP Etching Recipes|W-TiW Etch (Panasonic 1)}}
 
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Revision as of 10:42, 8 January 2018