Difference between revisions of "Dry Etching Recipes"

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(Added Ta2O5 etching, described in paper by Blumenthal Group.)
m (moves Si into proper alphabetical row)
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! bgcolor="#D0E7FF" align="center" | Si
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| {{rl|ICP Etching Recipes|Si Etch (PlasmaTherm/Bosch Etch)}}
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| {{rl|Other Dry Etching Recipes|Other Dry Etch (XeF2 Etcher)}}
 
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! bgcolor="#D0E7FF" align="center" | Si
 
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| {{rl|Other Dry Etching Recipes|Other Dry Etch (XeF2 Etcher)}}
 
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! bgcolor="#D0E7FF" align="center" | SiC
 
! bgcolor="#D0E7FF" align="center" | SiC

Revision as of 14:16, 22 September 2017