Difference between revisions of "Dry Etching Recipes"

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m (removed spurious column |- text, alphabetizing.)
(Added Ta2O5 etching, described in paper by Blumenthal Group.)
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! bgcolor="#D0E7FF" align="center" | Al<sub>2</sub>O<sub>3 (Sapphire)</sub>
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| {{rl|ICP Etching Recipes|Sapphire Etch(Panasonic 1)}}
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! bgcolor="#D0E7FF" align="center" | Sapphire (Al<sub>2</sub>O<sub>3</sub>)
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! bgcolor="#D0E7FF" align="center" | SiC
 
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| {{rl|ICP Etching Recipes|SiC Etch(Panasonic 1)}}
 
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! bgcolor="#D0E7FF" align="center" | SiC
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! bgcolor="#D0E7FF" align="center" | SiN
 
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|{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiN<sub>x</sub> Etching (RIE 3)}}
 
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| {{rl|ICP Etching Recipes|SINxEtch(Panasonic 1)}}
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| {{rl|ICP Etching Recipes|SiC Etch(Panasonic 1)}}
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| {{rl|ICP Etching Recipes|SINxEtch(Panasonic 2)}}
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| {{rl|Other Dry Etching Recipes|Other Dry Etch (Vapor HF Etcher)}}
 
| {{rl|Other Dry Etching Recipes|Other Dry Etch (Vapor HF Etcher)}}
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! bgcolor="#D0E7FF" align="center" | SiN
 
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|{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiN<sub>x</sub> Etching (RIE 3)}}
 
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|[https://www.osapublishing.org/optica/abstract.cfm?uri=optica-4-5-532 A]
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! bgcolor="#D0E7FF" align="center" | TiO<sub>2</sub>
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! bgcolor="#D0E7FF" align="center" | TiO<sub>2</sub>
 
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! bgcolor="#D0E7FF" align="center" | ZrO<sub>2</sub>
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! bgcolor="#D0E7FF" align="center" | ZnS
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| {{rl|RIE Etching Recipes|ZnS Etching (RIE 2)}}
 
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! bgcolor="#D0E7FF" align="center" | ZnS
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! bgcolor="#D0E7FF" align="center" | ZnSe
 
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| {{rl|RIE Etching Recipes|ZnS Etching (RIE 2)}}
 
| {{rl|RIE Etching Recipes|ZnS Etching (RIE 2)}}
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! bgcolor="#D0E7FF" align="center" | ZnSe
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! bgcolor="#D0E7FF" align="center" | ZrO<sub>2</sub>
 
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! bgcolor="#D0E7FF" align="center" | '''Material'''
 
! bgcolor="#D0E7FF" align="center" | '''Material'''

Revision as of 14:14, 22 September 2017