Difference between revisions of "Dry Etching Recipes"

From UCSB Nanofab Wiki
Jump to: navigation, search
Line 581: Line 581:
 
|
 
|
 
|
 
|
  +
| {{rl|ICP Etching Recipes|GaN Etch (Unaxis VLR)}}
|
 
 
|
 
|
 
|
 
|

Revision as of 10:25, 29 July 2016