Difference between revisions of "Dry Etching Recipes"

From UCSB Nanofab Wiki
Jump to: navigation, search
Line 472: Line 472:
 
! bgcolor="#D0E7FF" align="center" | InGaAlAs
 
! bgcolor="#D0E7FF" align="center" | InGaAlAs
 
|
 
|
| {{rl|RIE Etching Recipes|InP Etch (RIE 2)}}
+
| {{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}}
 
|
 
|
 
|
 
|

Revision as of 10:16, 29 July 2016