Difference between revisions of "Dry Etching Recipes"

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|{{rl|RIE Etching Recipes|RIE 5 (PlasmaThern)|GaN Etch (RIE 5)}}
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|{{rl|RIE Etching Recipes|RIE 5 (PlasmaTherm)|GaN Etch (RIE 5)}}
 
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| {{rl|ICP Etching Recipes|GaN Etch (Panasonic 1)}}
 
| {{rl|ICP Etching Recipes|GaN Etch (Panasonic 1)}}

Revision as of 09:56, 29 July 2016