Difference between revisions of "Dry Etching Recipes"

From UCSB Nanofab Wiki
Jump to: navigation, search
Line 478: Line 478:
 
|
 
|
 
|
 
|
| {{rl|ICP Etching Recipes|InP Etch (Unaxis VLR)}}
+
| {{rl|ICP Etching Recipes|ICP-Etch (Unaxis VLR)|InP-InGaAs-InAlAs Etch (Unaxis VLR)|InP Etch (Unaxis VLR)}}
 
|
 
|
 
|
 
|
Line 495: Line 495:
 
|
 
|
 
|
 
|
  +
| {{rl|ICP Etching Recipes|ICP-Etch (Unaxis VLR)|InP-InGaAs-InAlAs Etch (Unaxis VLR)|InP Etch (Unaxis VLR)}}
|
 
 
|
 
|
 
|
 
|

Revision as of 09:44, 29 July 2016