Difference between revisions of "Dry Etching Recipes"

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! width="65" bgcolor="#D0E7FF" align="center" | '''Material'''
 
! width="65" bgcolor="#D0E7FF" align="center" | '''Material'''
 
| width="65" bgcolor="#DAF1FF" | [[RIE 1 (Custom)|RIE 1<br>(Retired)]]
 
| width="65" bgcolor="#DAF1FF" | [[RIE 1 (Custom)|RIE 1<br>(Retired)]]
| width="65" bgcolor="#DAF1FF" | [[RIE 2 (MRC)|RIE 2<br> (MRC)]]
+
| width="65" bgcolor="#DAF1FF" | [[RIE_Etching_Recipes#RIE_2_.28MRC.29|RIE 2<br> (MRC)]]
 
| width="65" bgcolor="#DAF1FF" | [[RIE 3 (MRC)|RIE 3<br> (MRC)]]
 
| width="65" bgcolor="#DAF1FF" | [[RIE 3 (MRC)|RIE 3<br> (MRC)]]
 
| width="100" bgcolor="#DAF1FF" | [[RIE 5 (PlasmaTherm)|RIE 5<br>(PlasmaTherm)]]
 
| width="100" bgcolor="#DAF1FF" | [[RIE 5 (PlasmaTherm)|RIE 5<br>(PlasmaTherm)]]
Line 727: Line 727:
 
! bgcolor="#D0E7FF" align="center" | '''Material'''
 
! bgcolor="#D0E7FF" align="center" | '''Material'''
 
| bgcolor="#DAF1FF" | [[RIE 1 (Custom)|RIE 1<br>(Retired)]]
 
| bgcolor="#DAF1FF" | [[RIE 1 (Custom)|RIE 1<br>(Retired)]]
| bgcolor="#DAF1FF" | [[RIE 2 (MRC)|RIE 2<br> (MRC)]]
+
| bgcolor="#DAF1FF" | [[RIE_Etching_Recipes#RIE_2_.28MRC.29|RIE 2<br> (MRC)]]
 
| bgcolor="#DAF1FF" | [[RIE 3 (MRC)|RIE 3<br> (MRC)]]
 
| bgcolor="#DAF1FF" | [[RIE 3 (MRC)|RIE 3<br> (MRC)]]
 
| bgcolor="#DAF1FF" | [[RIE 5 (PlasmaTherm)|RIE 5<br>(PlasmaTherm)]]
 
| bgcolor="#DAF1FF" | [[RIE 5 (PlasmaTherm)|RIE 5<br>(PlasmaTherm)]]

Revision as of 15:14, 16 December 2015