Difference between revisions of "Dry Etching Recipes"

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! bgcolor="#D0E7FF" align="center" | '''Material'''
 
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| bgcolor="#DAF1FF" | [[RIE 1 (Retired)|RIE 1<br>(Custom)]]
 
| bgcolor="#DAF1FF" | [[RIE 2 (MRC)|RIE 2<br> (MRC)]]
 
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| bgcolor="#DAF1FF" | [[RIE 3 (MRC)|RIE 3<br> (MRC)]]

Revision as of 15:13, 16 December 2015