Difference between revisions of "Dry Etching Recipes"

From UCSB Nanofab Wiki
Jump to: navigation, search
Line 31: Line 31:
 
|
 
|
 
|
 
|
  +
| [[RIE Etching Recipes|A]]
|
 
 
|
 
|
 
| {{rl|ICP Etching Recipes|Al Etch(Panasonic 1)}}
 
| {{rl|ICP Etching Recipes|Al Etch(Panasonic 1)}}

Revision as of 08:45, 27 August 2015