Difference between revisions of "Dry Etching Recipes"

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| width="85" bgcolor="#DAF1FF" | [[XeF2 Etch (Xetch)|XeF2 Etch<br>(Xetch)]]
 
| width="85" bgcolor="#DAF1FF" | [[XeF2 Etch (Xetch)|XeF2 Etch<br>(Xetch)]]
 
| width="85" bgcolor="#DAF1FF" | [[Vapor HF Etch|Vapor HF Etch<br>(uETCH)]]
 
| width="85" bgcolor="#DAF1FF" | [[Vapor HF Etch|Vapor HF Etch<br>(uETCH)]]
| width="85" bgcolor="#DAF1FF" | [[Vapor HF Etch|CAIBE<br>(Oxford)]]
+
| width="85" bgcolor="#DAF1FF" | [[CAIBE (Oxford Ion Mill)|CAIBE<br>(Oxford)]]
 
|-bgcolor ="#EEFFFF"
 
|-bgcolor ="#EEFFFF"
 
! bgcolor="#D0E7FF" align="center" | Al
 
! bgcolor="#D0E7FF" align="center" | Al
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| bgcolor="#DAF1FF" | [[XeF2 Etch (Xetch)|XeF2 Etch<br>(Xetch)]]
 
| bgcolor="#DAF1FF" | [[XeF2 Etch (Xetch)|XeF2 Etch<br>(Xetch)]]
 
| bgcolor="#DAF1FF" | [[Vapor HF Etch|Vapor HF Etch<br>(uETCH)]]
 
| bgcolor="#DAF1FF" | [[Vapor HF Etch|Vapor HF Etch<br>(uETCH)]]
| bgcolor="#DAF1FF" | [[Vapor HF Etch|CAIBE<br>(Oxford)]]
+
| bgcolor="#DAF1FF" | [[CAIBE (Oxford Ion Mill)|CAIBE<br>(Oxford)]]
 
|}
 
|}
   

Revision as of 14:58, 9 July 2015