Difference between revisions of "Dry Etching Recipes"

From UCSB Nanofab Wiki
Jump to: navigation, search
Line 1: Line 1:
 
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible wikitable"
 
{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible wikitable"
 
|- bgcolor="#D0E7FF"
 
|- bgcolor="#D0E7FF"
! width="725" height="45" colspan="10" | <div style="font-size: 150%;">Dry Etching Recipes</div>
+
! width="725" height="45" colspan="15" | <div style="font-size: 150%;">Dry Etching Recipes</div>
 
|- bgcolor="#D0E7FF"
 
|- bgcolor="#D0E7FF"
 
| <!-- INTENTIONALLY LEFT BLANK -->
 
| <!-- INTENTIONALLY LEFT BLANK -->
!height="35" width="300" bgcolor="#D0E7FF" align="center" colspan="4" | '''[[RIE Etching Recipes|RIE Etching]]'''
+
! width="300" bgcolor="#D0E7FF" align="center" height="35" colspan="4" | '''[[RIE Etching Recipes|RIE Etching]]'''
 
! width="300" bgcolor="#D0E7FF" align="center" colspan="5" | '''[[ICP Etching Recipes|ICP Etching]]'''
 
! width="300" bgcolor="#D0E7FF" align="center" colspan="5" | '''[[ICP Etching Recipes|ICP Etching]]'''
 
|-
 
|-
!width="65" bgcolor="#D0E7FF" align="center" | '''Material'''
+
! width="65" bgcolor="#D0E7FF" align="center" | '''Material'''
|width="65" bgcolor="#DAF1FF" | [[RIE 1 (Custom)|RIE 1<br>(Custom)]]
+
| width="65" bgcolor="#DAF1FF" | [[RIE 1 (Custom)|RIE 1<br>(Custom)]]
|width="65" bgcolor="#DAF1FF" | [[RIE 2 (MRC)|RIE 2<br> (MRC)]]
+
| width="65" bgcolor="#DAF1FF" | [[RIE 2 (MRC)|RIE 2<br> (MRC)]]
|width="65" bgcolor="#DAF1FF" | [[RIE 3 (MRC)|RIE 3<br> (MRC)]]
+
| width="65" bgcolor="#DAF1FF" | [[RIE 3 (MRC)|RIE 3<br> (MRC)]]
|width="95" bgcolor="#DAF1FF" | [[RIE 5 (PlasmaTherm)|RIE 5<br>(PlasmaTherm)]]
+
| width="95" bgcolor="#DAF1FF" | [[RIE 5 (PlasmaTherm)|RIE 5<br>(PlasmaTherm)]]
|width="160" bgcolor="#DAF1FF" | [[Si Deep RIE (PlasmaTherm/Bosch Etch)|Si Deep RIE<br>(PlasmaTherm/Bosch Etch)]]
+
| width="160" bgcolor="#DAF1FF" | [[Si Deep RIE (PlasmaTherm/Bosch Etch)|Si Deep RIE<br>(PlasmaTherm/Bosch Etch)]]
|width="120" bgcolor="#DAF1FF" | [[ICP Etch 1 (Panasonic E626I)|ICP Etch 1<br>(Panasonic E626I)]]
+
| width="120" bgcolor="#DAF1FF" | [[ICP Etch 1 (Panasonic E626I)|ICP Etch 1<br>(Panasonic E626I)]]
|width="120" bgcolor="#DAF1FF" | [[ICP Etch 2 (Panasonic E640)|ICP Etch 2<br>(Panasonic E640)]]
+
| width="120" bgcolor="#DAF1FF" | [[ICP Etch 2 (Panasonic E640)|ICP Etch 2<br>(Panasonic E640)]]
|width="85" bgcolor="#DAF1FF" | [[ICP-Etch (Unaxis VLR)|ICP-Etch<br>(Unaxis VLR)]]
+
| width="85" bgcolor="#DAF1FF" | [[ICP-Etch (Unaxis VLR)|ICP-Etch<br>(Unaxis VLR)]]
  +
| width="85" bgcolor="#DAF1FF" |
  +
| width="85" bgcolor="#DAF1FF" |
  +
| width="85" bgcolor="#DAF1FF" |
  +
| width="85" bgcolor="#DAF1FF" |
  +
| width="85" bgcolor="#DAF1FF" |
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | Al
 
! bgcolor="#D0E7FF" align="center" | Al
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 28: Line 38:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | Ti
 
! bgcolor="#D0E7FF" align="center" | Ti
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 38: Line 53:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | Cr
 
! bgcolor="#D0E7FF" align="center" | Cr
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 48: Line 68:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | Ge
 
! bgcolor="#D0E7FF" align="center" | Ge
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 58: Line 83:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | Ag
 
! bgcolor="#D0E7FF" align="center" | Ag
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 68: Line 98:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | Ru
 
! bgcolor="#D0E7FF" align="center" | Ru
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 78: Line 113:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | Mo
 
! bgcolor="#D0E7FF" align="center" | Mo
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 88: Line 128:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | Ta
 
! bgcolor="#D0E7FF" align="center" | Ta
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 98: Line 143:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | W
 
! bgcolor="#D0E7FF" align="center" | W
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 108: Line 158:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | Al<sub>2</sub>O<sub>3</sub>
 
! bgcolor="#D0E7FF" align="center" | Al<sub>2</sub>O<sub>3</sub>
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 118: Line 173:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | HfO<sub>2</sub>
 
! bgcolor="#D0E7FF" align="center" | HfO<sub>2</sub>
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 128: Line 188:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | ITo
 
! bgcolor="#D0E7FF" align="center" | ITo
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 138: Line 203:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | SiO<sub>2</sub>
 
! bgcolor="#D0E7FF" align="center" | SiO<sub>2</sub>
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 148: Line 218:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | SiN
 
! bgcolor="#D0E7FF" align="center" | SiN
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 158: Line 233:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | SiOxNy
 
! bgcolor="#D0E7FF" align="center" | SiOxNy
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 168: Line 248:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | Ta<sub>2</sub>O<sub>5</sub>
 
! bgcolor="#D0E7FF" align="center" | Ta<sub>2</sub>O<sub>5</sub>
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 178: Line 263:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | TiO<sub>2</sub>
 
! bgcolor="#D0E7FF" align="center" | TiO<sub>2</sub>
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 188: Line 278:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | TiN
 
! bgcolor="#D0E7FF" align="center" | TiN
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 198: Line 293:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | ZnO<sub>2</sub>
 
! bgcolor="#D0E7FF" align="center" | ZnO<sub>2</sub>
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 208: Line 308:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | ZrO<sub>2</sub>
 
! bgcolor="#D0E7FF" align="center" | ZrO<sub>2</sub>
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 218: Line 323:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | GaAs
 
! bgcolor="#D0E7FF" align="center" | GaAs
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 228: Line 338:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | AlGaAs
 
! bgcolor="#D0E7FF" align="center" | AlGaAs
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 238: Line 353:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | InGaAlAs
 
! bgcolor="#D0E7FF" align="center" | InGaAlAs
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 248: Line 368:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | InGaAsP
 
! bgcolor="#D0E7FF" align="center" | InGaAsP
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 258: Line 383:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | InP
 
! bgcolor="#D0E7FF" align="center" | InP
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 268: Line 398:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | GaN
 
! bgcolor="#D0E7FF" align="center" | GaN
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 278: Line 413:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | AlGaN
 
! bgcolor="#D0E7FF" align="center" | AlGaN
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 288: Line 428:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | AlN
 
! bgcolor="#D0E7FF" align="center" | AlN
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 298: Line 443:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | GaN
 
! bgcolor="#D0E7FF" align="center" | GaN
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 308: Line 458:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | AlGaN
 
! bgcolor="#D0E7FF" align="center" | AlGaN
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 318: Line 473:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | AlN
 
! bgcolor="#D0E7FF" align="center" | AlN
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 328: Line 488:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | GaSb
 
! bgcolor="#D0E7FF" align="center" | GaSb
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 338: Line 503:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | CdTe
 
! bgcolor="#D0E7FF" align="center" | CdTe
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 348: Line 518:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | ZnSe
 
! bgcolor="#D0E7FF" align="center" | ZnSe
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 358: Line 533:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | Si
 
! bgcolor="#D0E7FF" align="center" | Si
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 368: Line 548:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | SiC
 
! bgcolor="#D0E7FF" align="center" | SiC
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|
Line 378: Line 563:
 
|-
 
|-
 
! bgcolor="#D0E7FF" align="center" | Sapphire
 
! bgcolor="#D0E7FF" align="center" | Sapphire
  +
|
  +
|
  +
|
  +
|
  +
|
 
|
 
|
 
|
 
|

Revision as of 13:48, 18 July 2012

Dry Etching Recipes
RIE Etching ICP Etching
Material RIE 1
(Custom)
RIE 2
(MRC)
RIE 3
(MRC)
RIE 5
(PlasmaTherm)
Si Deep RIE
(PlasmaTherm/Bosch Etch)
ICP Etch 1
(Panasonic E626I)
ICP Etch 2
(Panasonic E640)
ICP-Etch
(Unaxis VLR)
Al
Ti
Cr
Ge
Ag
Ru
Mo
Ta
W
Al2O3
HfO2
ITo
SiO2
SiN
SiOxNy
Ta2O5
TiO2
TiN
ZnO2
ZrO2
GaAs
AlGaAs
InGaAlAs
InGaAsP
InP
GaN
AlGaN
AlN
GaN
AlGaN
AlN
GaSb
CdTe
ZnSe
Si
SiC
Sapphire