Don Freeborn
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Don Freeborn
Position
Senior Development Engineer
Room Number
1109B
Phone
(805) 839-7975
E-Mail
dfreeborn@ucsb.edu
About
Current Work
Current Work
Tools
Tools
Don Freeborn is in charge of the following tools:
Plasma Therm DSE-iii(Plasma-Therm/Deep Silicon Etcher)
Wafer Bonder (SUSS SB6-8E)
E-Beam 3 (Temescal)
Plasma-Therm SLR: Fluorine ICP
ICP Etch 1 (Panasonic E626I)
XeF
2
Etch (Xetch)
Spin Rinse Dryer (SemiTool)
Chemical-Mechanical Polisher (Logitech)
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