Difference between revisions of "Don Freeborn"
Jump to navigation
Jump to search
| Line 26: | Line 26: | ||
*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP]] |
*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP]] |
||
*[[ICP Etch 1 (Panasonic E626I)]] |
*[[ICP Etch 1 (Panasonic E626I)]] |
||
| + | *[[E-Beam 1 (Sharon)]] |
||
| − | *[[XeF2 Etch (Xetch)|XeF<sub>2</sub> Etch (Xetch)]] |
||
*[[Spin Rinse Dryer (SemiTool)]] |
*[[Spin Rinse Dryer (SemiTool)]] |
||
*[[E-Beam 4 (CHA)]] |
*[[E-Beam 4 (CHA)]] |
||
Revision as of 19:54, 27 October 2021
|
About
.
Current Work
.
Tools
Don Freeborn is in charge of the following tools: