Difference between revisions of "Don Freeborn"
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*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP]] | *[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP]] | ||
*[[ICP Etch 1 (Panasonic E626I)]] | *[[ICP Etch 1 (Panasonic E626I)]] | ||
| − | *[[ | + | *[[E-Beam 1 (Sharon)]] |
*[[Spin Rinse Dryer (SemiTool)]] | *[[Spin Rinse Dryer (SemiTool)]] | ||
*[[E-Beam 4 (CHA)]] | *[[E-Beam 4 (CHA)]] | ||
|} | |} | ||
Revision as of 19:54, 27 October 2021
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About
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Current Work
.
Tools
Don Freeborn is in charge of the following tools: