Difference between revisions of "Don Freeborn"

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(Linked the Fluorine etch page.)
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Current Work
 
Current Work
 
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=Current Work=
 
=Current Work=
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*Plasma Therm DSE-iii(Plasma-Therm/Deep Silicon Etcher)
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*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)|Plasma Therm DSE-iii(Plasma-Therm/Deep Silicon Etcher)]]
 
*[[Wafer Bonder (SUSS SB6-8E)]]
 
*[[Wafer Bonder (SUSS SB6-8E)]]
 
*[[E-Beam 3 (Temescal)]]
 
*[[E-Beam 3 (Temescal)]]
 
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*[[Plasma-Therm SLR: Fluorine ICP]]
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*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP]]
 
*[[ICP Etch 1 (Panasonic E626I)]]
 
*[[ICP Etch 1 (Panasonic E626I)]]
 
*[[XeF2 Etch (Xetch)|XeF<sub>2</sub> Etch (Xetch)]]
 
*[[XeF2 Etch (Xetch)|XeF<sub>2</sub> Etch (Xetch)]]

Revision as of 15:26, 25 February 2019

Don Freeborn
Position Senior Development Engineer
Room Number 1109C
Phone (805) 839-3918x216
E-Mail dfreeborn@ece.ucsb.edu


About

Current Work

Current Work

Tools

Tools

Don Freeborn

is in charge of the following tools: