Difference between revisions of "Don Freeborn"

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{{staff|{{PAGENAME}}
 
{{staff|{{PAGENAME}}
 
|position  = Senior Development Engineer
 
|position  = Senior Development Engineer
|room = 1109C
+
|room = 1109B
|phone = (805) 839-3918x216
+
|phone = (805) 839-7975
 
|cell =   
 
|cell =   
|email = dfreeborn@ece.ucsb.edu
+
|email = dfreeborn@ucsb.edu
 
}}
 
}}
  
 
=About=
 
=About=
  
 
+
.
 
 
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=Current Work=
 
=Current Work=
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.  
  
 
=Tools=
 
=Tools=
 
{{PAGENAME}} is in charge of the following tools:  
 
{{PAGENAME}} is in charge of the following tools:  
 
{|
 
{|
|-valign="top"
+
|- valign="top"
 
|
 
|
*[[Suss Aligners (SUSS MJB-3)]]
+
*[[PECVD 1 (PlasmaTherm 790)]]
*[[IR Aligner (SUSS MJB-3 IR)]]
+
*[[PECVD 2 (Advanced Vacuum)]]
*[[Contact Aligner (SUSS MA-6)]]
 
*[[Wafer Bonder (SUSS SB6-8E)]]
 
 
*[[E-Beam 3 (Temescal)]]
 
*[[E-Beam 3 (Temescal)]]
*[[RIE 1 (Custom)]]
+
*[[E-Beam 4 (CHA)]]
*[[RIE 5 (PlasmaTherm)]]
+
*[[Surface Analysis (KLA/Tencor Surfscan)]]
 
||
 
||
*[[Si Deep RIE (PlasmaTherm/Bosch Etch)]]
+
*[[Thermal Evap 1]]
*[[ICP Etch 1 (Panasonic E626I)]]
+
*[[Thermal Evap 2 (Solder)]]
*[[XeF2 Etch (Xetch)|XeF<sub>2</sub> Etch (Xetch)]]
 
 
*[[Spin Rinse Dryer (SemiTool)]]
 
*[[Spin Rinse Dryer (SemiTool)]]
*[[Chemical-Mechanical Polisher (Logitech)]]
+
*[[Vacuum Sealer]]
*[[Goniometer]]
+
*[[SEM Sample Coater (Hummer)]]
 +
 
 
|}
 
|}

Latest revision as of 08:48, 28 October 2021

Don Freeborn
Position Senior Development Engineer
Room Number 1109B
Phone (805) 839-7975
E-Mail dfreeborn@ucsb.edu


About

.

Current Work

.

Tools

Don Freeborn is in charge of the following tools: