Difference between revisions of "Don Freeborn"
Jump to navigation
Jump to search
| (6 intermediate revisions by the same user not shown) | |||
| Line 19: | Line 19: | ||
|- valign="top" |
|- valign="top" |
||
| |
| |
||
| + | *[[PECVD 1 (PlasmaTherm 790)]] |
||
| − | * |
||
*[[PECVD 2 (Advanced Vacuum)]] |
*[[PECVD 2 (Advanced Vacuum)]] |
||
| − | *[[Wafer Bonder (SUSS SB6-8E)]] |
||
*[[E-Beam 3 (Temescal)]] |
*[[E-Beam 3 (Temescal)]] |
||
| + | *[[E-Beam 4 (CHA)]] |
||
| + | *[[Surface Analysis (KLA/Tencor Surfscan)]] |
||
|| |
|| |
||
| + | *[[Thermal Evap 1]] |
||
| − | *[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP]] |
||
| − | *[[ |
+ | *[[Thermal Evap 2 (Solder)]] |
| − | *[[XeF2 Etch (Xetch)|XeF<sub>2</sub> Etch (Xetch)]] |
||
*[[Spin Rinse Dryer (SemiTool)]] |
*[[Spin Rinse Dryer (SemiTool)]] |
||
| + | *[[Vacuum Sealer]] |
||
| − | *[[Chemical-Mechanical Polisher (Logitech)]] |
||
| + | *[[SEM Sample Coater (Hummer)]] |
||
| + | |||
|} |
|} |
||
Latest revision as of 09:48, 28 October 2021
|
About
.
Current Work
.
Tools
Don Freeborn is in charge of the following tools: