Difference between revisions of "Don Freeborn"
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+ | *[[PECVD 1 (PlasmaTherm 790)]] |
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− | * |
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+ | *[[PECVD 2 (Advanced Vacuum)]] |
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− | *[[DSEIII (PlasmaTherm/Deep Silicon Etcher)|Plasma Therm DSE-iii(Plasma-Therm/Deep Silicon Etcher)]] |
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− | *[[Wafer Bonder (SUSS SB6-8E)]] |
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*[[E-Beam 3 (Temescal)]] |
*[[E-Beam 3 (Temescal)]] |
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+ | *[[E-Beam 4 (CHA)]] |
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+ | *[[Surface Analysis (KLA/Tencor Surfscan)]] |
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+ | *[[Thermal Evap 1]] |
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− | *[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP]] |
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− | *[[ |
+ | *[[Thermal Evap 2 (Solder)]] |
− | *[[XeF2 Etch (Xetch)|XeF<sub>2</sub> Etch (Xetch)]] |
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*[[Spin Rinse Dryer (SemiTool)]] |
*[[Spin Rinse Dryer (SemiTool)]] |
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+ | *[[Vacuum Sealer]] |
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− | *[[Chemical-Mechanical Polisher (Logitech)]] |
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+ | *[[SEM Sample Coater (Hummer)]] |
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Latest revision as of 09:48, 28 October 2021
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About
.
Current Work
.
Tools
Don Freeborn is in charge of the following tools: