Latest revision as of 09:48, 28 October 2021

Don Freeborn

Position	Senior Development Engineer
Room Number	1109B
Phone	(805) 839-7975
E-Mail	dfreeborn@ucsb.edu

About

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Don Freeborn is in charge of the following tools:

@@ Line 19: / Line 19: @@
 |- valign="top"
 |
-*
+*[[PECVD 1 (PlasmaTherm 790)]]
-*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)|Plasma Therm DSE-iii(Plasma-Therm/Deep Silicon Etcher)]]
+*[[PECVD 2 (Advanced Vacuum)]]
-*[[Wafer Bonder (SUSS SB6-8E)]]
 *[[E-Beam 3 (Temescal)]]
+*[[E-Beam 4 (CHA)]]
+*[[Surface Analysis (KLA/Tencor Surfscan)]]
 ||
-*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP]]
+*[[Thermal Evap 1]]
-*[[ICP Etch 1 (Panasonic E626I)]]
+*[[Thermal Evap 2 (Solder)]]
-*[[XeF2 Etch (Xetch)|XeF<sub>2</sub> Etch (Xetch)]]
 *[[Spin Rinse Dryer (SemiTool)]]
-*[[Chemical-Mechanical Polisher (Logitech)]]
+*[[Vacuum Sealer]]
+*[[SEM Sample Coater (Hummer)]]
 |}