Difference between revisions of "Don Freeborn"

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=About=
 
=About=
  
Current Work
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=Current Work=
 
=Current Work=
Tools
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*[[PECVD 1 (PlasmaTherm 790)]]
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)|Plasma Therm DSE-iii(Plasma-Therm/Deep Silicon Etcher)]]
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*[[PECVD 2 (Advanced Vacuum)]]
*[[Wafer Bonder (SUSS SB6-8E)]]
 
 
*[[E-Beam 3 (Temescal)]]
 
*[[E-Beam 3 (Temescal)]]
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*[[E-Beam 4 (CHA)]]
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*[[Surface Analysis (KLA/Tencor Surfscan)]]
 
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*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP]]
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*[[Thermal Evap 1]]
*[[ICP Etch 1 (Panasonic E626I)]]
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*[[Thermal Evap 2 (Solder)]]
*[[XeF2 Etch (Xetch)|XeF<sub>2</sub> Etch (Xetch)]]
 
 
*[[Spin Rinse Dryer (SemiTool)]]
 
*[[Spin Rinse Dryer (SemiTool)]]
*[[Chemical-Mechanical Polisher (Logitech)]]
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*[[Vacuum Sealer]]
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*[[SEM Sample Coater (Hummer)]]
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Latest revision as of 09:48, 28 October 2021

Don Freeborn
Position Senior Development Engineer
Room Number 1109B
Phone (805) 839-7975
E-Mail dfreeborn@ucsb.edu


About

.

Current Work

.

Tools

Don Freeborn is in charge of the following tools: