Difference between revisions of "Don Freeborn"
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| − | * |
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| − | *[[PECVD 2 (Advanced Vacuum)]] |
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*[[PECVD 1 (PlasmaTherm 790)]] |
*[[PECVD 1 (PlasmaTherm 790)]] |
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| − | *[[ |
+ | *[[PECVD 2 (Advanced Vacuum)]] |
| ⚫ | |||
| − | *[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP]] |
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| − | *[[ICP Etch 1 (Panasonic E626I)]] |
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*[[E-Beam 1 (Sharon)]] |
*[[E-Beam 1 (Sharon)]] |
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| − | *[[ |
+ | *[[E-Beam 3 (Temescal)]] |
*[[E-Beam 4 (CHA)]] |
*[[E-Beam 4 (CHA)]] |
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| ⚫ | |||
| + | *[[Thermal Evap 1]] |
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| + | *[[Thermal Evap 2 (Solder)]] |
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| + | *[[Spin Rinse Dryer (SemiTool)] |
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| + | *[[Vacuum Sealer]] |
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| + | *[[SEM Sample Coater (Hummer)]] |
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| + | *[[Surface Analysis (KLA/Tencor Surfscan)]] |
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Revision as of 20:03, 27 October 2021
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About
.
Current Work
.
Tools
Don Freeborn is in charge of the following tools:
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