Difference between revisions of "Don Freeborn"
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*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP]] |
*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)|Plasma-Therm SLR: Fluorine ICP]] |
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*[[ICP Etch 1 (Panasonic E626I)]] |
*[[ICP Etch 1 (Panasonic E626I)]] |
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+ | *[[E-Beam 1 (Sharon)]] |
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− | *[[XeF2 Etch (Xetch)|XeF<sub>2</sub> Etch (Xetch)]] |
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*[[Spin Rinse Dryer (SemiTool)]] |
*[[Spin Rinse Dryer (SemiTool)]] |
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*[[E-Beam 4 (CHA)]] |
*[[E-Beam 4 (CHA)]] |
Revision as of 19:54, 27 October 2021
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About
.
Current Work
.
Tools
Don Freeborn is in charge of the following tools: