Direct-Write Lithography Recipes
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 Work In Progress This article is still under construction. It may contain factual errors. Content is subject to change. |
Photolithography Recipes for the Heidelberg MLA150 will go here.
Positive Resist (MLA150)
General notes: Hotplates used, filters, laser wavelengths, etc.
Negative Resist (MLA150)
General notes: Hotplates used, filters, laser wavelengths, etc.