Difference between revisions of "Direct-Write Lithography Recipes"
Jump to navigation
Jump to search
(initial page) |
(inital page) |
||
| Line 1: | Line 1: | ||
| + | {{recipes|Lithography}} |
||
{{WIP}} |
{{WIP}} |
||
Photolithography Recipes for the Heidelberg MLA150 will go here. |
Photolithography Recipes for the Heidelberg MLA150 will go here. |
||
| + | |||
| + | == Positive Resist (MLA150) == |
||
| + | General notes: Hotplates used, filters, laser wavelengths, etc. |
||
| + | |||
| + | == Negative Resist (MLA150) == |
||
| + | General notes: Hotplates used, filters, laser wavelengths, etc. |
||
Revision as of 22:23, 13 September 2020
Back to Lithography Recipes.
 Work In Progress This article is still under construction. It may contain factual errors. Content is subject to change. |
Photolithography Recipes for the Heidelberg MLA150 will go here.
Positive Resist (MLA150)
General notes: Hotplates used, filters, laser wavelengths, etc.
Negative Resist (MLA150)
General notes: Hotplates used, filters, laser wavelengths, etc.