Difference between revisions of "Direct-Write Lithography Recipes"

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''General notes: Hotplates used, filters, laser wavelengths, etc.''
 
''General notes: Hotplates used, filters, laser wavelengths, etc.''
  
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{| class="wikitable" border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;"
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|- bgcolor="#D0E7FF"
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! width="100" |Resist
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! width="100" |Spin Cond.
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! width="75" |Bake
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! width="75" |Thickness
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! width="125" |Exposure Time
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! width="100" |Focus Offset
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! width="75" |PEB
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! width="75" |Flood
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! width="100" |Developer
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! width="125" |Developer Time
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! width="300" |Comments
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|-
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|AZ5214
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|6 krpm/30”
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|95°C/60”
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|~ 1.0 um
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|
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|
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|
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|60"
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|AZ300MIF
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|60"
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| align="left" |
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*???
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|}
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=== Greyscale Lithography ===
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''Description...''
 
{| class="wikitable" border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;"
 
{| class="wikitable" border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;"
 
|- bgcolor="#D0E7FF"
 
|- bgcolor="#D0E7FF"

Revision as of 22:34, 13 September 2020

UnderConstruction.jpg

Work In Progress

This article is still under construction. It may contain factual errors. Content is subject to change.


Maskless Aligner (Heidelberg MLA150)

Photolithography Recipes for the Heidelberg MLA150. Description of litho params- different lasers available, greyscale etc.

Positive Resist (MLA150)

General notes: Hotplates used, filters, laser wavelengths, etc.

Resist Spin Cond. Bake Thickness Exposure Time Focus Offset PEB Developer Developer Time Comments
SPR955CM0.9 3 krpm/30” 95°C/60” ~ 0.9 um AZ300MIF

Negative Resist (MLA150)

General notes: Hotplates used, filters, laser wavelengths, etc.

Resist Spin Cond. Bake Thickness Exposure Time Focus Offset PEB Flood Developer Developer Time Comments
AZ5214 6 krpm/30” 95°C/60” ~ 1.0 um 60" AZ300MIF 60"
  • ???

Greyscale Lithography

Description...

Resist Spin Cond. Bake Thickness Exposure Time Focus Offset PEB Flood Developer Developer Time Comments
AZ5214 6 krpm/30” 95°C/60” ~ 1.0 um 60" AZ300MIF 60"
  • ???