Difference between revisions of "Direct-Write Lithography Recipes"

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{{recipes|Lithography}}
 
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Photolithography Recipes for the Heidelberg MLA150 will go here.
 
Photolithography Recipes for the Heidelberg MLA150 will go here.
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== Positive Resist (MLA150) ==
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General notes: Hotplates used, filters, laser wavelengths, etc.
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== Negative Resist (MLA150) ==
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General notes: Hotplates used, filters, laser wavelengths, etc.

Revision as of 22:23, 13 September 2020

Back to Lithography Recipes.

UnderConstruction.jpg

Work In Progress

This article is still under construction. It may contain factual errors. Content is subject to change.


Photolithography Recipes for the Heidelberg MLA150 will go here.

Positive Resist (MLA150)

General notes: Hotplates used, filters, laser wavelengths, etc.

Negative Resist (MLA150)

General notes: Hotplates used, filters, laser wavelengths, etc.