Difference between revisions of "Deep UV Optical Microscope (Olympus)"
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= About = |
= About = |
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| − | This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using |
+ | This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250 nm light. Surface features less than 100nm can be resolved. |
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| + | The system has precision motorized stage control and is fully computer controlled for image capture and sample manipulation. |
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| + | A Good system for CD measurements on wafer (250nm and above) without entry into the SEM. |
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| + | [[File:Olympus MX61A-DUV res test 100x DUV v1.png|alt=DUV microscope image with 1µm scale bar|none|thumb|504x504px|100x DUV image taken with the Olympus MX61A-DUV, showing sub-micron resolution.]] |
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Revision as of 01:02, 1 September 2018
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About
This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250 nm light. Surface features less than 100nm can be resolved.
The system has precision motorized stage control and is fully computer controlled for image capture and sample manipulation.
A Good system for CD measurements on wafer (250nm and above) without entry into the SEM.
