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DUV Flood Expose

Tool Type	Lithography
Location	Bay 6
Supervisor	Mike Silva
Supervisor Phone	(805) 893-3096
Supervisor E-Mail	silva@ece.ucsb.edu

Description	Deep UV Flood Exposer / Light source and HA-1KC2 power supply
Manufacturer	AB Manufacturing

About

This unit consists of a collimated deep ultraviolet (DUV) light source (mercury gas discharge short arc lamp) and power supply. The substrate is placed on a rotating chuck (not presently working) and is exposed by opening a timer-controlled shutter.

Materials that are exposed are primarily spun-on thin films such as PMMA, PMGI, etc.

Detailed Specifications

DUV wavelengths are 200-260 nm; the lamp power is limited to either 1250 or 2100 watts and can operate in either constant intensity or constant power mode
The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample
Exposure can be performed on a 4" wafer
Lamps are nominally rated for 400 hours
A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation

Spectra Images

Aligner with No Filter

Aligner with Filter for i-line Exposure

DUV Exposure System Spectra